@article{SchoeningThustKordosetal.2000, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Kordos, P. and Schultze, J.W. and L{\"u}th, H.}, title = {Capacitive microsensors for biochemical sensing based on porous silicon technology}, series = {Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek}, journal = {Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek}, publisher = {Elsevier}, address = {Amsterdam [u.a.]}, pages = {1184 -- 1187}, year = {2000}, language = {en} }