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G. and Mourzina, Y. G. and Legin, A. V. and Ermelenko, Y. E. and Schubert, J. and Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition}, series = {Russian Journal of Applied Chemistry. 75 (2002), H. 3}, journal = {Russian Journal of Applied Chemistry. 75 (2002), H. 3}, isbn = {1070-4272}, pages = {351 -- 356}, year = {2002}, language = {en} } @article{KurowskiSchultzeLuethetal.2002, author = {Kurowski, A. and Schultze, J. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.}, series = {Sensors and Actuators B. 83 (2002), H. 1-3}, journal = {Sensors and Actuators B. 83 (2002), H. 1-3}, isbn = {0925-4005}, pages = {123 -- 128}, year = {2002}, language = {en} }