@article{KaemperPicardBrilletal.2003,
  author    = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)},
  title     = {The Virtual Cleanroom - a new tool in teaching MST process technologies},
  series = {mst news International newsletter on micro - nano Integration (2003)},
  journal   = {mst news International newsletter on micro - nano Integration (2003)},
  isbn      = {0948-3128},
  pages     = {35 -- 36},
  year      = {2003},
  language  = {en}
}
@article{KaemperPicardBrilletal.2003,
  author    = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus},
  title     = {The Virtual Clean Room - a new tool in teaching MST process technologies},
  year      = {2003},
  abstract  = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.},
  subject      = {Virtuelle Maschine},
  language  = {en}
}
@inproceedings{MertenConradKaemperetal.2006,
  author    = {Merten, Sabine and Conrad, Thorsten and K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas},
  title     = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries},
  year      = {2006},
  abstract  = {Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R\&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.},
  subject      = {Virtuelles Laboratorium},
  language  = {en}
}