@article{FoersterMalindretosIndlekoferetal.2002,
  author    = {F{\"o}rster, Arnold and Malindretos, J{\"o}rg and Indlekofer, Klaus Michael and Lepsa, Mihail Ion},
  title     = {Homogeneity analysis of ion-implanted resonant tunnelling diodes for applications in digital logic circuits. Malindretos, J{\"o}rg; F{\"o}rster, Arno; Indlekofer, Klaus Michael; Lepsa, Mihail Ion; Hardtdegen, Hilde; Schmidt, Roland; Luth, Hans},
  series = {Superlattices and Microstructures. 31 (2002), H. 6},
  journal   = {Superlattices and Microstructures. 31 (2002), H. 6},
  isbn      = {0749-6036},
  pages     = {315 -- 325},
  year      = {2002},
  language  = {en}
}