@article{HagemannGeittnerWarnieretal.1986,
  author    = {Hagemann, Hans-J{\"u}rgen and Geittner, P. and Warnier, J. and Wilson, H.},
  title     = {PCVD at high deposition rates. Geittner, P.; Hagemann, H. J.; Warnier, J.; Wilson, H.},
  series = {Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7},
  journal   = {Journal of Lightwave Technology (J-LT) / Institute of Electrical and Electronics Engineers (IEEE). 4 (1986), H. 7},
  isbn      = {0733-8724},
  pages     = {818 -- 822},
  year      = {1986},
  language  = {en}
}