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(Jahrbuch der Deutschen Gesellschaft f{\"u}r Luft- und Raumfahrt 2007 ; Bd. 1-5. - Enth.: Jahrbuch der Deutschen Gesellschaft f{\"u}r Luft- und Raumfahrt 2006 ; Bd. 3)}, booktitle = {First CEAS European Air and Space Conference : Motto: century perspectives : Deutscher Luft-und Raumfahrtkongress 2007 : 10-13 September 2007 in Berlin, Germany. 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E.}, title = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. 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