@article{SchoeningSimonisRugeetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans}, title = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer}, series = {Sensors. 2 (2002), H. 1}, journal = {Sensors. 2 (2002), H. 1}, isbn = {1424-8220}, doi = {10.3390/s20100011}, pages = {11 -- 22}, year = {2002}, abstract = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.}, language = {en} } @article{SchoeningSimonisKringsetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, A. and Krings, T. and L{\"u}th, H. and Wang, J.}, title = {Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis}, series = {Electroanalysis}, volume = {14}, journal = {Electroanalysis}, number = {13}, issn = {1040-0397}, pages = {955 -- 958}, year = {2002}, language = {en} } @techreport{SchoeningSelmerBaumann2012, author = {Sch{\"o}ning, Michael Josef and Selmer, Thorsten and Baumann, Marcus}, title = {Schlussbericht zum Projekt "Bio-LAPS" : Optimierung des Betriebs eines Biogasfermenters mit Hilfe eines Feldeffekt-Biosensors auf Basis eines lichtadressierbaren potentiometrischen Sensors (LAPS) : Laufzeit: 01.09.2008 bis 31.01.2012 : F{\"o}rderkennzeichen 07NR264 bzw.22026407}, publisher = {BMELV}, address = {Berlin}, pages = {44 S.}, year = {2012}, language = {de} } @article{SchoeningSchuetzSchrothetal.1998, author = {Sch{\"o}ning, Michael Josef and Sch{\"u}tz, S. and Schroth, P. and Weißbecker, B. and Steffen, A. and Kordos, P. and Hummel, Hans E.}, title = {A BioFET on the basis of intact insect antennae}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {235 -- 238}, year = {1998}, language = {en} } @article{SchoeningSchuetzRiemeretal.1997, author = {Sch{\"o}ning, Michael Josef and Sch{\"u}tz, S. and Riemer, A. and Weißbecker, B. and Steffen, A. and Kordos, P. and L{\"u}th, H. and Hummel, Hans E.}, title = {A BioFET on the basis of intact insect antennae}, series = {Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.}, journal = {Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.}, publisher = {Sensor Lab Sp.}, address = {Warsaw}, isbn = {83-908335-0-6}, pages = {1461 -- 1464}, year = {1997}, language = {en} } @article{SchoeningSchuetz2009, author = {Sch{\"o}ning, Michael Josef and Sch{\"u}tz, S.}, title = {Der K{\"a}fer/Chip-Sensor als bioelektronischer "Schn{\"u}ffler"}, series = {Bioanalytik f{\"u}r Einsteiger : [Diabetes, Drogen und DNA] / Reinhard Renneberg. Darja S{\"u}ßbier (Ill.). [Red.: Andreas Held ...]}, journal = {Bioanalytik f{\"u}r Einsteiger : [Diabetes, Drogen und DNA] / Reinhard Renneberg. Darja S{\"u}ßbier (Ill.). [Red.: Andreas Held ...]}, publisher = {Spektrum, Akad. Verl.}, address = {Heidelberg}, isbn = {978-3-8274-1831-9}, pages = {204 -- 205}, year = {2009}, language = {de} } @article{SchoeningSchubertZanderetal.1999, author = {Sch{\"o}ning, Michael Josef and Schubert, J{\"u}rgen and Zander, Willy and M{\"u}ller-Veggian, Mattea}, title = {Pulsed laser deposition as a novel preparation technique for chemical microsensors}, series = {Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)}, journal = {Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)}, pages = {124 -- 134}, year = {1999}, language = {en} } @article{SchoeningSchubertKloocketal.2001, author = {Sch{\"o}ning, Michael Josef and Schubert, Joachim P. and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, journal = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, isbn = {0208-5216}, pages = {107 -- 119}, year = {2001}, language = {en} } @article{SchoeningSchubertKloocketal.2002, author = {Sch{\"o}ning, Michael Josef and Schubert, J and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Lecture Notes of the ICB Seminars}, journal = {Lecture Notes of the ICB Seminars}, publisher = {MCB}, address = {Warsaw}, pages = {55 -- 66}, year = {2002}, language = {en} } @article{SchoeningSchrothLuethetal.2001, author = {Sch{\"o}ning, Michael Josef and Schroth, Peter and L{\"u}th, Hans and Hummel, Hans E. and Sch{\"u}tz, Stefan}, title = {Insect chemoreceptors coupled to silicon transistors as innovative biosensors}, series = {Proceedings of SPIE. 4205 (2001)}, journal = {Proceedings of SPIE. 4205 (2001)}, pages = {152 -- 162}, year = {2001}, language = {en} }