@article{KaemperDoepperClemensetal.1997, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.}, title = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)}, series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, journal = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, isbn = {0960-1317}, pages = {230 -- 232}, year = {1997}, language = {en} } @article{KaemperBergWolfetal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Wolf, A. and Lehr, H.}, title = {Entwicklung von Linsenhaltern f{\"u}r ein SMIF-kompatibles Magazinsystem und deren Fertigung durch Mikrospritzguß. Berg, U.; K{\"a}mper, K.-P.; Wolf, A.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{KaemperBergLehretal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Lehr, H. and Ehrfeld, W.}, title = {Experimentelle Untersuchungen zur automatisierten Mikrolinsenmontage. Berg, U.; K{\"a}mper, K.-P.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{KaemperBergBegemannetal.1998, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)}, title = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors}, series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, journal = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, publisher = {Messe Bremen}, address = {Bremen}, isbn = {3-933339-00-6}, pages = {552 -- 555}, year = {1998}, language = {en} } @article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} } @article{KaemperAbrahamHopster1992, author = {K{\"a}mper, Klaus-Peter and Abraham, D. L. and Hopster, H.}, title = {Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001)}, series = {Physical Review B. 45 (1992), H. 24}, journal = {Physical Review B. 45 (1992), H. 24}, isbn = {1095-3795}, pages = {14335 -- 14346}, year = {1992}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {37 -- 40}, year = {1996}, language = {en} } @article{Kaemper2002, author = {K{\"a}mper, Klaus-Peter}, title = {Die Mikroaktorik wird erwachsen}, series = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, journal = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, pages = {4 -- 5}, year = {2002}, language = {de} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Skript zur Vorlesung Mikrotechnik 1}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik}, subject = {Mikrosystemtechnik}, language = {de} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)}, subject = {Sensor}, language = {en} }