@article{Mohnke1987,
  author    = {Mohnke, Andreas},
  title     = {High-rate sputtering of zinc oxide with a funnel-shaped magnetic field: Effect of the target thickness on the layer properties},
  series = {Vakuum-Technik. 36 (1987), H. 5},
  journal   = {Vakuum-Technik. 36 (1987), H. 5},
  isbn      = {0042-2266},
  pages     = {148 -- 151},
  year      = {1987},
  language  = {en}
}