@article{FoersterCambelKicinetal.2002,
  author    = {F{\"o}rster, Arnold and Cambel, V. and Kicin, S. and Kuliffayov{\´a}, M.},
  title     = {Preparation of patterned GaAs structures for MEMS and MOEMS. Cambel, V.; Kicin, S.; Kuliffayov{\´a}, M.; Kov{\´a}cov{\´a}, E.; Nov{\´a}k, J.; Kostic, I.; F{\"o}rster, A.},
  series = {Materials Science and Engineering: C. 19 (2002), H. 2},
  journal   = {Materials Science and Engineering: C. 19 (2002), H. 2},
  isbn      = {0928-4931},
  pages     = {161 -- 165},
  year      = {2002},
  language  = {en}
}