@article{FoersterLayetLueth1988, author = {F{\"o}rster, Arnold and Layet, J. M. and L{\"u}th, H.}, title = {The effect of inhomogeneous dopant profiles on the electron energy loss spectra of Si(100) /}, series = {Applied Physics A: Materials Science \& Processing. 47 (1988), H. 1}, journal = {Applied Physics A: Materials Science \& Processing. 47 (1988), H. 1}, isbn = {0947-8396}, pages = {95 -- 97}, year = {1988}, language = {en} } @article{FoersterLayetLueth1989, author = {F{\"o}rster, Arnold and Layet, J. M. and L{\"u}th, H.}, title = {Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy}, series = {Applied Surface Science. 41 - 42 (1989)}, journal = {Applied Surface Science. 41 - 42 (1989)}, isbn = {0169-4332}, pages = {306 -- 311}, year = {1989}, language = {en} }