@article{SchoeningNaetherAugeretal.2005, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, series = {Sensors and Actuators B. 108 (2005), H. 1-2}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, isbn = {0925-4005}, pages = {986 -- 992}, year = {2005}, language = {en} } @inproceedings{PlatenPoghossianSchoening2006, author = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique}, url = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477}, year = {2006}, abstract = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.}, subject = {Biosensor}, language = {en} } @article{PoghossianIngebrandtYeungetal.2004, author = {Poghossian, Arshak and Ingebrandt, S. and Yeung, C.-K. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Microsensors based on ion-sensitive field-effect transistors for biomedical applications}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1036 -- 1037}, year = {2004}, language = {en} } @article{MoritzYoshinobuFingeretal.2004, author = {Moritz, W. and Yoshinobu, T. and Finger, F. and Krause, S. and Xu, M. and Sch{\"o}ning, Michael Josef}, title = {Microscopy of impedance and surface ion concentrations}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1000 -- 1001}, year = {2004}, language = {en} } @article{LeinhosSchusserBaeckeretal.2014, author = {Leinhos, Marcel and Schusser, Sebastian and B{\"a}cker, Matthias and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Micromachined multi-parameter sensor chip for the control of polymer-degradation medium}, series = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, volume = {211}, journal = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330364}, pages = {1346 -- 1351}, year = {2014}, abstract = {It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.}, language = {en} } @article{WagnerMiyamotoShigiharaetal.2011, author = {Wagner, Torsten and Miyamoto, Ko-ichiro and Shigihara, Noriko and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Microfluidic systems with free definable sensor spots by an integrated light-addressable potentiometric sensor}, series = {Procedia Engineering. 25 (2011)}, journal = {Procedia Engineering. 25 (2011)}, publisher = {Elsevier}, address = {Amsterdam}, isbn = {1877-7058}, pages = {791 -- 794}, year = {2011}, language = {en} } @article{BaeckerRaueSchusseretal.2012, author = {B{\"a}cker, Matthias and Raue, Markus and Schusser, Sebastian and Jeitner, C. and Breuer, L. and Wagner, P. and Poghossian, Arshak and F{\"o}rster, Arnold and Mang, Thomas and Sch{\"o}ning, Michael Josef}, title = {Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100763}, pages = {839 -- 845}, year = {2012}, abstract = {Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3-12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off.}, language = {en} } @article{AridaMohsenSchoening2009, author = {Arida, Hassan and Mohsen, Q. and Sch{\"o}ning, Michael Josef}, title = {Microfabrication, characterization and analytical application of a new thin-film silver microsensor}, series = {Electrochimica Acta. 54 (2009), H. 13}, journal = {Electrochimica Acta. 54 (2009), H. 13}, isbn = {0013-4686}, pages = {3543 -- 3547}, year = {2009}, language = {en} } @article{SchoeningLueth2002, author = {Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Microfabricated semiconductor structures - Advances in (bio-)chemical sensing}, series = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, journal = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, publisher = {Springer}, address = {Berlin [u.a.]}, isbn = {3-540-43699-5}, pages = {79 -- 92}, year = {2002}, language = {en} } @article{Schoening2001, author = {Sch{\"o}ning, Michael Josef}, title = {Microelectronics contacts (bio-)chemistry - Semiconductor-based sensors}, series = {Biologi Italiani. 8 (2001)}, journal = {Biologi Italiani. 8 (2001)}, isbn = {0392-2510}, pages = {5 -- 10}, year = {2001}, language = {en} }