@inproceedings{PlatenPoghossianSchoening2006,
  author    = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef},
  title     = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique},
  url       = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477},
  year      = {2006},
  abstract  = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.},
  subject      = {Biosensor},
  language  = {en}
}
@article{SchoeningAbouzarIngebrandtetal.2006,
  author    = {Sch{\"o}ning, Michael Josef and Abouzar, Maryam H. and Ingebrandt, Sven and Platen, Johannes and Offenh{\"a}usser, Andreas and Poghossian, Arshak},
  title     = {Towards label-free detection of charged macromolecules using field-effect-based structures : Scaling down from capacitive EIS sensor over ISFET to nano-scale devices},
  series = {Nanostructured materials and hybrid composites for gas sensors and biomedical applications : symposium held April 18-20, 2006, San Francisco , California, U.S.A.},
  journal   = {Nanostructured materials and hybrid composites for gas sensors and biomedical applications : symposium held April 18-20, 2006, San Francisco , California, U.S.A.},
  number    = {paper 0915-R05-04},
  editor    = {Comini, Elisabetta},
  isbn      = {9781558998711},
  pages     = {89 -- 94},
  year      = {2006},
  language  = {en}
}