@article{PrumeMuraltCalameetal.2007,
  author    = {Prume, Klaus and Muralt, P. and Calame, F. and Schmitz-Kempen, T.},
  title     = {Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;},
  series = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1},
  journal   = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1},
  isbn      = {0885-3010},
  pages     = {81 -- 14},
  year      = {2007},
  language  = {en}
}
@article{PrumeTyholdtCalameetal.2007,
  author    = {Prume, Klaus and Tyholdt, F. and Calame, F. and Raeder, H.},
  title     = {Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.},
  series = {Journal of Electroceramics. 19 (2007), H. 4},
  journal   = {Journal of Electroceramics. 19 (2007), H. 4},
  isbn      = {1385-3449},
  pages     = {311 -- 314},
  year      = {2007},
  language  = {en}
}