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[Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, journal = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, publisher = {FSRM}, address = {Neuchatel}, pages = {100 -- 110}, year = {1995}, language = {en} } @inproceedings{BeerHaidnWillms1995, author = {Beer, Stefan and Haidn, O.J. and Willms, Herbert}, title = {Control of stoichiometric propellant supply in an H2/O2-spinning reserve system}, series = {Combustion technologies for a clean environment : selected papers from the proceedings of the first international conference, Vilamoura, Portugal, September 3 - 6, 1991. - (Energy, combustion and the environment ;1)}, booktitle = {Combustion technologies for a clean environment : selected papers from the proceedings of the first international conference, Vilamoura, Portugal, September 3 - 6, 1991. - (Energy, combustion and the environment ;1)}, editor = {Carvalho, Maria da Gra{\c{c}}a}, publisher = {Gordon and Breach}, address = {Basel [u.a.]}, isbn = {2-88124-619-2}, pages = {825 -- 838}, year = {1995}, language = {en} } @article{Klocke1995, author = {Klocke, Martina}, title = {Study Units in the CIM-Oriented Study Factory}, series = {Qualification for Computer-Integrated Manufacturing. 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Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.}, series = {Proceedings of the SPIE - The International Society for Optical Engineering}, journal = {Proceedings of the SPIE - The International Society for Optical Engineering}, isbn = {0277-786X}, pages = {202 -- 210}, year = {1996}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels SpritzguƟ hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {37 -- 40}, year = {1996}, language = {en} } @article{KaemperEhrfeldHagemannetal.1996, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hagemann, B. and Lehr, H.}, title = {Electromagnetic permanent magnet micromotor with integrated micro gear box. K{\"a}mper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Th{\"u}rigen, C.; Wittig, T.}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {429}, year = {1996}, language = {en} } @article{KaemperDoepperClemensetal.1997, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.}, title = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)}, series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, journal = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, isbn = {0960-1317}, pages = {230 -- 232}, year = {1997}, language = {en} }