@article{HagemannGeittnerWarnieretal.1985, author = {Hagemann, Hans-J{\"u}rgen and Geittner, P. and Warnier, J. and Weling, F.}, title = {Reduction of geometric taper losses in the PCVD process. Geittner, P.; Hagemann, H. J.; Warnier, J.; Weling, F.; Wilson, H.}, series = {Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13}, journal = {Electronics letters : an intern. publication / The Institution of Electrical Engineers. 21 (1985), H. 13}, isbn = {0013-5194}, pages = {870 -- 871}, year = {1985}, language = {en} }