@article{FoersterLayetLueth1989,
  author    = {F{\"o}rster, Arnold and Layet, J. M. and L{\"u}th, H.},
  title     = {Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy},
  series = {Applied Surface Science. 41 - 42 (1989)},
  journal   = {Applied Surface Science. 41 - 42 (1989)},
  isbn      = {0169-4332},
  pages     = {306 -- 311},
  year      = {1989},
  language  = {en}
}