@article{BussEckenWinkelsetal.2000, author = {Buß, G. and Ecken, H. and Winkels, S. and Sch{\"o}ning, Michael Josef and L{\"u}th, H. and Schultze, J. W.}, title = {Galvanic modifications of multifunctional silicon-based microelectrode arrays}, series = {Electrochemical technology applications in electronics : proceedings of the third international symposium / [International Symposium on Electrochemical Technology Applications in Electronics, held during October 20 - 22, 1999, Honolulu, Hawaii]. Electrodeposition Division. Ed.: L. T. Romankiw}, journal = {Electrochemical technology applications in electronics : proceedings of the third international symposium / [International Symposium on Electrochemical Technology Applications in Electronics, held during October 20 - 22, 1999, Honolulu, Hawaii]. Electrodeposition Division. Ed.: L. T. Romankiw}, publisher = {Electrochemical Society}, address = {Pennington, NJ}, isbn = {1566772575}, pages = {209 -- 215}, year = {2000}, language = {en} }