@inproceedings{FoersterStockMontanarietal.2006, author = {F{\"o}rster, Arnold and Stock, J{\"u}rgen and Montanari, Simone and Lepsa, Mihail Ion and L{\"u}th, Hans}, title = {Fabrication and characterisation of GaAs Gunn Diode Chips for applications at 77 GHz in automotive industry}, url = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1462}, year = {2006}, abstract = {GaAs-based Gunn diodes with graded AlGaAs hot electron injector heterostructures have been developed under the special needs in automotive applications. The fabrication of the Gunn diode chips was based on total substrate removal and processing of integrated Au heat sinks. Especially, the thermal and RF behavior of the diodes have been analyzed by DC, impedance and S-parameter measurements. The electrical investigations have revealed the functionality of the hot electron injector. An optimized layer structure could fulfill the requirements in adaptive cruise control (ACC) systems at 77 GHz with typical output power between 50 and 90 mW.}, subject = {Biosensor}, language = {en} } @article{SchoeningSimonisRugeetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans}, title = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer}, series = {Sensors. 2 (2002), H. 1}, journal = {Sensors. 2 (2002), H. 1}, isbn = {1424-8220}, doi = {10.3390/s20100011}, pages = {11 -- 22}, year = {2002}, abstract = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.}, language = {en} } @article{PoghossianBerndsenLuethetal.2001, author = {Poghossian, Arshak and Berndsen, Lars and L{\"u}th, Hans and Sch{\"o}ning, Michael Josef}, title = {Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs}, series = {Proceedings of SPIE. 4560 (2001)}, journal = {Proceedings of SPIE. 4560 (2001)}, pages = {19 -- 27}, year = {2001}, language = {en} } @article{SchoeningSchrothLuethetal.2001, author = {Sch{\"o}ning, Michael Josef and Schroth, Peter and L{\"u}th, Hans and Hummel, Hans E. and Sch{\"u}tz, Stefan}, title = {Insect chemoreceptors coupled to silicon transistors as innovative biosensors}, series = {Proceedings of SPIE. 4205 (2001)}, journal = {Proceedings of SPIE. 4205 (2001)}, pages = {152 -- 162}, year = {2001}, language = {en} } @article{SchoeningPoghossianYoshinobuetal.2001, author = {Sch{\"o}ning, Michael Josef and Poghossian, Arshak and Yoshinobu, Tatsuo and L{\"u}th, Hans}, title = {Semiconductor-based field-effect structures for chemical sensing}, pages = {188 -- 198}, year = {2001}, language = {en} } @article{PoghossianYoshinobuSimonisetal.2001, author = {Poghossian, Arshak and Yoshinobu, Tatsuo and Simonis, A. and Ecken, H. and L{\"u}th, Hans and Sch{\"o}ning, Michael Josef}, title = {Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS?}, series = {Sensors and Actuators B. 78 (2001), H. 1-3}, journal = {Sensors and Actuators B. 78 (2001), H. 1-3}, isbn = {0925-4005}, pages = {237 -- 242}, year = {2001}, language = {en} }