@article{KurowskiSchultzeLuethetal.2002,
  author    = {Kurowski, A. and Schultze, J. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef},
  title     = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.},
  series = {Sensors and Actuators B. 83 (2002), H. 1-3},
  journal   = {Sensors and Actuators B. 83 (2002), H. 1-3},
  isbn      = {0925-4005},
  pages     = {123 -- 128},
  year      = {2002},
  language  = {en}
}