@article{PrumeGerberKuegeleretal.2004, author = {Prume, Klaus and Gerber, Peter and K{\"u}geler, Carsten and Roelofs, Andreas}, title = {Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; K{\"u}geler, C. ; Roelofs, A. ; B{\"o}ttger, U. ; Waser, R. ; Schmitz-Kempen,}, isbn = {0-7803-8410-5}, pages = {7 -- 10}, year = {2004}, language = {en} }