@article{SchoeningSchubertKloocketal.2002, author = {Sch{\"o}ning, Michael Josef and Schubert, J and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Lecture Notes of the ICB Seminars}, journal = {Lecture Notes of the ICB Seminars}, publisher = {MCB}, address = {Warsaw}, pages = {55 -- 66}, year = {2002}, language = {en} } @article{Schoening2003, author = {Sch{\"o}ning, Michael Josef}, title = {Silicon-based biochemical sensors}, series = {CNI - The Center of Nanoelectronic Systems for Information Technology}, journal = {CNI - The Center of Nanoelectronic Systems for Information Technology}, publisher = {Foschungszentrum J{\"u}lich}, pages = {165 -- 170}, year = {2003}, language = {en} } @article{SchoeningLueth2002, author = {Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Microfabricated semiconductor structures - Advances in (bio-)chemical sensing}, series = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, journal = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, publisher = {Springer}, address = {Berlin [u.a.]}, isbn = {3-540-43699-5}, pages = {79 -- 92}, year = {2002}, language = {en} } @article{SchoeningSchubertKloocketal.2001, author = {Sch{\"o}ning, Michael Josef and Schubert, Joachim P. and Kloock, Joachim P. and Zander, W. and Mourzina, Y. G. and Legin, A. and Vlasov, Y. G. and L{\"u}th, H.}, title = {Innovative thin film techniques for microfabricating electrochemical sensors}, series = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, journal = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 4}, isbn = {0208-5216}, pages = {107 -- 119}, year = {2001}, language = {en} } @article{SchrothWeissbeckerSchuetzetal.2002, author = {Schroth, P. and Weißbecker, B. and Sch{\"u}tz, S. and Ecken, H. and Yoshinobu, T. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Bioelectronic signal processing - intact chemoreceptors coupled to field-effect devices}, series = {Lecture Notes of the ICB Seminars}, journal = {Lecture Notes of the ICB Seminars}, publisher = {MCB}, address = {Warsaw}, pages = {28 -- 42}, year = {2002}, language = {en} } @article{SchrothWeissbeckerSchuetzetal.2001, author = {Schroth, P. and Weißbecker, B. and Sch{\"u}tz, S. and Ecken, H. and Yoshinobu, T. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Bioelectronic signal processing - intact chemoreceptors coupled to field-effect devices}, series = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 3}, journal = {Biocybernetics and Biomedical Engineering. 21 (2001), H. 3}, isbn = {0208-5216}, pages = {27 -- 42}, year = {2001}, language = {en} } @article{Schoening2002, author = {Sch{\"o}ning, Michael Josef}, title = {Novel approaches to design siliconbased field-effect sensors}, series = {Electrochemical Microsystem Technologies, New Trends in Electrochemistry Vol. 2}, journal = {Electrochemical Microsystem Technologies, New Trends in Electrochemistry Vol. 2}, publisher = {Taylor \& Francis}, address = {London New York}, pages = {384 -- 408}, year = {2002}, language = {en} } @article{SchoeningLueth2001, author = {Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Novel concepts for silicon-based biosensors}, series = {Physica Status Solidi (A) (2001)}, journal = {Physica Status Solidi (A) (2001)}, isbn = {0031-8965}, pages = {65 -- 77}, year = {2001}, language = {en} } @article{KurowskiSchultzeLuethetal.2002, author = {Kurowski, A. and Schultze, J. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.}, series = {Sensors and Actuators B. 83 (2002), H. 1-3}, journal = {Sensors and Actuators B. 83 (2002), H. 1-3}, isbn = {0925-4005}, pages = {123 -- 128}, year = {2002}, language = {en} } @article{ErmelenkoYoshinobuMourzinaetal.2002, author = {Ermelenko, Y. and Yoshinobu, T. and Mourzina, Y. and Furuichi, K. and Levichev, S. and Vlasov, Y. and Sch{\"o}ning, Michael Josef and Iwasaki, H.}, title = {Lithium sensor based on the laser scanning semiconductor transducer}, series = {Analytica Chimica Acta. 459 (2002), H. 1}, journal = {Analytica Chimica Acta. 459 (2002), H. 1}, issn = {0378-4304}, pages = {1 -- 9}, year = {2002}, language = {en} } @article{SchoeningSchrothLuethetal.2001, author = {Sch{\"o}ning, Michael Josef and Schroth, Peter and L{\"u}th, Hans and Hummel, Hans E. and Sch{\"u}tz, Stefan}, title = {Insect chemoreceptors coupled to silicon transistors as innovative biosensors}, series = {Proceedings of SPIE. 4205 (2001)}, journal = {Proceedings of SPIE. 4205 (2001)}, pages = {152 -- 162}, year = {2001}, language = {en} } @article{SchoeningSchubertZanderetal.1999, author = {Sch{\"o}ning, Michael Josef and Schubert, J{\"u}rgen and Zander, Willy and M{\"u}ller-Veggian, Mattea}, title = {Pulsed laser deposition as a novel preparation technique for chemical microsensors}, series = {Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)}, journal = {Proceedings of SPIE 3857, Chemical Microsenors and Applications II, 124 (November 18, 1999). 3857 (1999)}, pages = {124 -- 134}, year = {1999}, language = {en} } @article{SchoeningGlueckKordosetal.1999, author = {Sch{\"o}ning, Michael Josef and Gl{\"u}ck, O. and Kordos, P. and L{\"u}th, H. and Emons, H.}, title = {Thin film electrodes for trace metal analysis by dc resistance changes}, series = {Proceedings of SPIE. 3857 (1999)}, journal = {Proceedings of SPIE. 3857 (1999)}, pages = {135 -- 143}, year = {1999}, language = {en} } @article{SchoeningThustMuellerVeggianetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and M{\"u}ller-Veggian, Mattea and Kordos, P.}, title = {A novel silicon-based sensor array with capacitive EIS structures}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {225 -- 230}, year = {1998}, language = {en} } @article{SchoeningTsarouchasSchaubetal.1996, author = {Sch{\"o}ning, Michael Josef and Tsarouchas, D. and Schaub, A. and Beckers, L. (u.a.)}, title = {A highly long-term stable silicon-based pH sensor using pulsed laser deposition technique}, series = {Sensors and Actuators B. 35 (1996), H. 1-3}, journal = {Sensors and Actuators B. 35 (1996), H. 1-3}, isbn = {0925-4005}, pages = {228 -- 233}, year = {1996}, language = {en} } @article{SchoeningSaukeSteffenetal.1995, author = {Sch{\"o}ning, Michael Josef and Sauke, M. and Steffen, A. and Marso, M. (u.a.)}, title = {Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes}, series = {Sensors and Actuators B. 27 (1995), H. 1-3}, journal = {Sensors and Actuators B. 27 (1995), H. 1-3}, isbn = {0925-4005}, pages = {325 -- 328}, year = {1995}, language = {en} } @article{SchoeningBrunsHoffmannetal.1993, author = {Sch{\"o}ning, Michael Josef and Bruns, M. and Hoffmann, W. and Hoffmann, B. (u.a.)}, title = {Iodide ion-sensitive field-effect structures}, series = {Sensors and Actuators B. 15 (1993), H. 1-3}, journal = {Sensors and Actuators B. 15 (1993), H. 1-3}, isbn = {0925-4005}, pages = {192 -- 194}, year = {1993}, language = {en} } @article{SchoeningSimonisRugeetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans}, title = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer}, series = {Sensors. 2 (2002), H. 1}, journal = {Sensors. 2 (2002), H. 1}, isbn = {1424-8220}, doi = {10.3390/s20100011}, pages = {11 -- 22}, year = {2002}, abstract = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.}, language = {en} } @article{SimonisKringsLuethetal.2001, author = {Simonis, A. and Krings, T. and L{\"u}th, H. and Wang, J. and Sch{\"o}ning, Michael Josef}, title = {A „hybrid" thin-film pH sensor with integrated thick-film reference}, series = {Sensors. 1 (2001), H. 6}, journal = {Sensors. 1 (2001), H. 6}, isbn = {1424-8220}, pages = {183 -- 192}, year = {2001}, language = {en} } @article{Schoening2001, author = {Sch{\"o}ning, Michael Josef}, title = {Microelectronics contacts (bio-)chemistry - Semiconductor-based sensors}, series = {Biologi Italiani. 8 (2001)}, journal = {Biologi Italiani. 8 (2001)}, isbn = {0392-2510}, pages = {5 -- 10}, year = {2001}, language = {en} }