@article{HuckPoghossianKerroumietal.2014, author = {Huck, Christina and Poghossian, Arshak and Kerroumi, Iman and Schusser, Sebastian and B{\"a}cker, Matthias and Zander, Willi and Schubert, J{\"u}rgen and Buniatyan, Vahe V. and Martirosyan, Norayr W. and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material}, series = {Electroanalysis}, volume = {26}, journal = {Electroanalysis}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-4109 (E-Journal); 1040-0397 (Print)}, doi = {10.1002/elan.201400076}, pages = {980 -- 987}, year = {2014}, abstract = {It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.}, language = {en} } @article{HuckPoghossianBaeckeretal.2015, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Reisert, Steffen and Kramer, Friederike and Begoyan, Vardges K. and Buniatyan, Vahe V. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter sensing using high-k oxide of barium strontium titanate}, series = {Physica status solidi (a)}, volume = {212}, journal = {Physica status solidi (a)}, number = {6}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201431911}, pages = {1259}, year = {2015}, abstract = {High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.}, language = {en} } @inproceedings{NaetherPoghossianPlatenetal.2006, author = {N{\"a}ther, Niko and Poghossian, Arshak and Platen, J. and Yoshinobu, T. and Koudelka-Hep, M. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle}, series = {Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ...}, booktitle = {Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ...}, address = {Warsaw}, pages = {172 -- 181}, year = {2006}, language = {en} } @article{PoghossianSchultzeSchoening2003, author = {Poghossian, Arshak and Schultze, J. W. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle}, series = {Sensors and Actuators B. 91 (2003), H. 1-3}, journal = {Sensors and Actuators B. 91 (2003), H. 1-3}, isbn = {0925-4005}, pages = {83 -- 91}, year = {2003}, language = {en} } @inproceedings{HuckPoghossianBuniatyanetal.2014, author = {Huck, Christina and Poghossian, Arshak and Buniatyan, V. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter detection for supporting monitoring and control of biogas processes in agriculture}, series = {Sensoren und Messsysteme 2014 ; Beitr{\"a}ge der 17. GMA/ITG-Fachtagung vom 3. bis 4. Juni 2014 in N{\"u}rnberg. (ITG-Fachbericht ; 250)}, booktitle = {Sensoren und Messsysteme 2014 ; Beitr{\"a}ge der 17. GMA/ITG-Fachtagung vom 3. bis 4. Juni 2014 in N{\"u}rnberg. (ITG-Fachbericht ; 250)}, publisher = {VDE-Verl.}, address = {Berlin}, organization = {VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik}, isbn = {978-3-8007-3622-5}, pages = {1 -- 5}, year = {2014}, language = {en} } @article{SchusserKrischerBaeckeretal.2015, author = {Schusser, Sebastian and Krischer, Maximillian and B{\"a}cker, Matthias and Poghossian, Arshak and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Monitoring of the Enzymatically Catalyzed Degradation of Biodegradable Polymers by Means of Capacitive Field-Effect Sensors}, series = {Analytical Chemistry}, volume = {87}, journal = {Analytical Chemistry}, number = {13}, publisher = {ACS Publications}, address = {Washington, DC}, issn = {1520-6882}, doi = {10.1021/acs.analchem.5b00617}, pages = {6607 -- 6613}, year = {2015}, abstract = {Designing novel or optimizing existing biodegradable polymers for biomedical applications requires numerous tests on the effect of substances on the degradation process. In the present work, polymer-modified electrolyte-insulator-semiconductor (PMEIS) sensors have been applied for monitoring an enzymatically catalyzed degradation of polymers for the first time. The thin films of biodegradable polymer poly(d,l-lactic acid) and enzyme lipase were used as a model system. During degradation, the sensors were read-out by means of impedance spectroscopy. In order to interpret the data obtained from impedance measurements, an electrical equivalent circuit model was developed. In addition, morphological investigations of the polymer surface have been performed by means of in situ atomic force microscopy. The sensor signal change, which reflects the progress of degradation, indicates an accelerated degradation in the presence of the enzyme compared to hydrolysis in neutral pH buffer media. The degradation rate increases with increasing enzyme concentration. The obtained results demonstrate the potential of PMEIS sensors as a very promising tool for in situ and real-time monitoring of degradation of polymers.}, language = {en} } @article{MolinnusIkenJohnenetal.2022, author = {Molinnus, Denise and Iken, Heiko and Johnen, Anna Lynn and Richstein, Benjamin and Hellmich, Lena and Poghossian, Arshak and Knoch, Joachim and Sch{\"o}ning, Michael Josef}, title = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition}, series = {physica status solidi (a) applications and materials science}, volume = {219}, journal = {physica status solidi (a) applications and materials science}, number = {8}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.202100660}, pages = {7 Seiten}, year = {2022}, abstract = {Miniaturized electrolyte-insulator-semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al-p-Si-Ta2O5(5 nm), Al-p-Si-Si3N4(1 or 2 nm)-Ta2O5 (5 nm), and Al-p-Si-SiO2(3.6 nm)-Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance-voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2-Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)-Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance-voltage curve among the studied stacked gate insulator systems.}, language = {en} } @article{SchoeningNaetherAugeretal.2004, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies}, series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, journal = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, publisher = {Japan Association of Chemical Sensors}, address = {Fukuoka}, pages = {554 -- 555}, year = {2004}, language = {en} } @article{SchoeningNaetherAugeretal.2005, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, series = {Sensors and Actuators B. 108 (2005), H. 1-2}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, isbn = {0925-4005}, pages = {986 -- 992}, year = {2005}, language = {en} } @inproceedings{PlatenPoghossianSchoening2006, author = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique}, url = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477}, year = {2006}, abstract = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.}, subject = {Biosensor}, language = {en} } @article{PoghossianIngebrandtYeungetal.2004, author = {Poghossian, Arshak and Ingebrandt, S. and Yeung, C.-K. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Microsensors based on ion-sensitive field-effect transistors for biomedical applications}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1036 -- 1037}, year = {2004}, language = {en} } @article{LeinhosSchusserBaeckeretal.2014, author = {Leinhos, Marcel and Schusser, Sebastian and B{\"a}cker, Matthias and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Micromachined multi-parameter sensor chip for the control of polymer-degradation medium}, series = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, volume = {211}, journal = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330364}, pages = {1346 -- 1351}, year = {2014}, abstract = {It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.}, language = {en} } @article{BaeckerRaueSchusseretal.2012, author = {B{\"a}cker, Matthias and Raue, Markus and Schusser, Sebastian and Jeitner, C. and Breuer, L. and Wagner, P. and Poghossian, Arshak and F{\"o}rster, Arnold and Mang, Thomas and Sch{\"o}ning, Michael Josef}, title = {Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100763}, pages = {839 -- 845}, year = {2012}, abstract = {Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3-12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off.}, language = {en} } @article{HuckSchiffelsHerreraetal.2013, author = {Huck, Christina and Schiffels, Johannes and Herrera, Cony N. and Schelden, Maximilian and Selmer, Thorsten and Poghossian, Arshak and Baumann, Marcus and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Metabolic responses of Escherichia coli upon glucose pulses captured by a capacitive field-effect sensor}, series = {Physica Status Solidi (A)}, volume = {210}, journal = {Physica Status Solidi (A)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {0031-8965}, doi = {10.1002/pssa.201200900}, pages = {926 -- 931}, year = {2013}, abstract = {Living cells are complex biological systems transforming metabolites taken up from the surrounding medium. Monitoring the responses of such cells to certain substrate concentrations is a challenging task and offers possibilities to gain insight into the vitality of a community influenced by the growth environment. Cell-based sensors represent a promising platform for monitoring the metabolic activity and thus, the "welfare" of relevant organisms. In the present study, metabolic responses of the model bacterium Escherichia coli in suspension, layered onto a capacitive field-effect structure, were examined to pulses of glucose in the concentration range between 0.05 and 2 mM. It was found that acidification of the surrounding medium takes place immediately after glucose addition and follows Michaelis-Menten kinetic behavior as a function of the glucose concentration. In future, the presented setup can, therefore, be used to study substrate specificities on the enzymatic level and may as well be used to perform investigations of more complex metabolic responses. Conclusions and perspectives highlighting this system are discussed.}, language = {en} } @article{SchoeningPoghossianSchultze2003, author = {Sch{\"o}ning, Michael Josef and Poghossian, Arshak and Schultze, Joachim W.}, title = {Measuring seven parameters by two ISFET modules in a microcell set-up}, series = {Int. Journal of Computational Engineering Science. 4 (2003), H. 2}, journal = {Int. Journal of Computational Engineering Science. 4 (2003), H. 2}, isbn = {1465-8763}, pages = {257 -- 260}, year = {2003}, language = {en} } @article{GasparyanPoghossianVitusevichetal.2011, author = {Gasparyan, Ferdinand V. and Poghossian, Arshak and Vitusevich, Svetlana A. and Petrychuk, Mykhaylo V. and Sydoruk, Viktor A. and Siqueira, Jos{\´e} R. Jr. and Oliveira, Osvaldo N. Jr. and Offenh{\"a}usser, Andreas and Sch{\"o}ning, Michael Josef}, title = {Low-Frequency Noise in Field-Effect Devices Functionalized With Dendrimer/Carbon-Nanotube Multilayers}, series = {IEEE Sensors Journal. 11 (2011), H. 1}, journal = {IEEE Sensors Journal. 11 (2011), H. 1}, publisher = {IEEE}, address = {New York}, isbn = {1530-437X}, pages = {142 -- 149}, year = {2011}, language = {en} } @article{GasparyanPoghossianVitusevichetal.2009, author = {Gasparyan, F. V. and Poghossian, Arshak and Vitusevich, S. A. and Petrychuk, M. V. and Sydoruk, V. A. and Surmalyan, A. V. and Siqueira, J. R. and Oliveira, O. N. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Low Frequency Noise In Electrolyte-Gate Field-Effect Devices Functionalized With Dendrimer/Carbon-Nanotube Multilayers}, series = {Noise and fluctuations : 20th International Conference on Noise and Fluctuations, ICNF 2009, Pisa, Italy, 14 - 19 June 2009 / ed. Massimo Macucci; Giovanni Basso}, journal = {Noise and fluctuations : 20th International Conference on Noise and Fluctuations, ICNF 2009, Pisa, Italy, 14 - 19 June 2009 / ed. Massimo Macucci; Giovanni Basso}, publisher = {American Inst. of Physics}, address = {Melville, NY}, isbn = {9780735406650}, pages = {133 -- 136}, year = {2009}, language = {en} } @article{YoshinobuMiyamotoWerneretal.2017, author = {Yoshinobu, Tatsuo and Miyamoto, Ko-ichiro and Werner, Frederik and Poghossian, Arshak and Wagner, Torsten and Sch{\"o}ning, Michael Josef}, title = {Light-addressable potentiometric sensors for quantitative spatial imaging of chemical species}, series = {Annual Review of Analytical Chemistry}, volume = {10}, journal = {Annual Review of Analytical Chemistry}, publisher = {Annual Reviews}, address = {Palo Alto, Calif.}, issn = {1936-1327}, doi = {10.1146/annurev-anchem-061516-045158}, pages = {225 -- 246}, year = {2017}, abstract = {A light-addressable potentiometric sensor (LAPS) is a semiconductor-based chemical sensor, in which a measurement site on the sensing surface is defined by illumination. This light addressability can be applied to visualize the spatial distribution of pH or the concentration of a specific chemical species, with potential applications in the fields of chemistry, materials science, biology, and medicine. In this review, the features of this chemical imaging sensor technology are compared with those of other technologies. Instrumentation, principles of operation, and various measurement modes of chemical imaging sensor systems are described. The review discusses and summarizes state-of-the-art technologies, especially with regard to the spatial resolution and measurement speed; for example, a high spatial resolution in a submicron range and a readout speed in the range of several tens of thousands of pixels per second have been achieved with the LAPS. The possibility of combining this technology with microfluidic devices and other potential future developments are discussed.}, language = {en} } @incollection{SchoeningWagnerPoghossianetal.2018, author = {Sch{\"o}ning, Michael Josef and Wagner, Torsten and Poghossian, Arshak and Miyamoto, K.I. and Werner, C.F. and Krause, S. and Yoshinobu, T.}, title = {Light-addressable potentiometric sensors for (bio-)chemical sensing and imaging}, series = {Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry. Vol. 7}, booktitle = {Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry. Vol. 7}, publisher = {Elsevier}, address = {Amsterdam}, isbn = {9780128097397}, pages = {295 -- 308}, year = {2018}, language = {en} } @article{SiqueiraWernerBaeckeretal.2009, author = {Siqueira, Jose R. and Werner, Frederik and B{\"a}cker, Matthias and Poghossian, Arshak and Zucolotto, Valtencir and Oliveira, Osvaldo N. Jr. and Sch{\"o}ning, Michael Josef}, title = {Layer-by-Layer Assembly of Carbon Nanotubes Incorporated in Light-Addressable Potentiometric Sensors}, series = {Journal of Physical Chemistry C. 113 (2009), H. 33}, journal = {Journal of Physical Chemistry C. 113 (2009), H. 33}, publisher = {American Chemical Society}, address = {Washington, DC}, isbn = {1932-7455}, pages = {14765 -- 14770}, year = {2009}, language = {en} }