@article{MolinnusIkenJohnenetal.2022, author = {Molinnus, Denise and Iken, Heiko and Johnen, Anna Lynn and Richstein, Benjamin and Hellmich, Lena and Poghossian, Arshak and Knoch, Joachim and Sch{\"o}ning, Michael Josef}, title = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition}, series = {physica status solidi (a) applications and materials science}, volume = {219}, journal = {physica status solidi (a) applications and materials science}, number = {8}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.202100660}, pages = {7 Seiten}, year = {2022}, abstract = {Miniaturized electrolyte-insulator-semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al-p-Si-Ta2O5(5 nm), Al-p-Si-Si3N4(1 or 2 nm)-Ta2O5 (5 nm), and Al-p-Si-SiO2(3.6 nm)-Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance-voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2-Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)-Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance-voltage curve among the studied stacked gate insulator systems.}, language = {en} } @article{SchoeningNaetherAugeretal.2004, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies}, series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, journal = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, publisher = {Japan Association of Chemical Sensors}, address = {Fukuoka}, pages = {554 -- 555}, year = {2004}, language = {en} } @article{SchoeningNaetherAugeretal.2005, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, series = {Sensors and Actuators B. 108 (2005), H. 1-2}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, isbn = {0925-4005}, pages = {986 -- 992}, year = {2005}, language = {en} } @inproceedings{PlatenPoghossianSchoening2006, author = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique}, url = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477}, year = {2006}, abstract = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.}, subject = {Biosensor}, language = {en} } @article{PoghossianIngebrandtYeungetal.2004, author = {Poghossian, Arshak and Ingebrandt, S. and Yeung, C.-K. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Microsensors based on ion-sensitive field-effect transistors for biomedical applications}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1036 -- 1037}, year = {2004}, language = {en} } @article{LeinhosSchusserBaeckeretal.2014, author = {Leinhos, Marcel and Schusser, Sebastian and B{\"a}cker, Matthias and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Micromachined multi-parameter sensor chip for the control of polymer-degradation medium}, series = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, volume = {211}, journal = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330364}, pages = {1346 -- 1351}, year = {2014}, abstract = {It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.}, language = {en} } @article{BaeckerRaueSchusseretal.2012, author = {B{\"a}cker, Matthias and Raue, Markus and Schusser, Sebastian and Jeitner, C. and Breuer, L. and Wagner, P. and Poghossian, Arshak and F{\"o}rster, Arnold and Mang, Thomas and Sch{\"o}ning, Michael Josef}, title = {Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100763}, pages = {839 -- 845}, year = {2012}, abstract = {Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3-12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off.}, language = {en} } @article{HuckSchiffelsHerreraetal.2013, author = {Huck, Christina and Schiffels, Johannes and Herrera, Cony N. and Schelden, Maximilian and Selmer, Thorsten and Poghossian, Arshak and Baumann, Marcus and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Metabolic responses of Escherichia coli upon glucose pulses captured by a capacitive field-effect sensor}, series = {Physica Status Solidi (A)}, volume = {210}, journal = {Physica Status Solidi (A)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {0031-8965}, doi = {10.1002/pssa.201200900}, pages = {926 -- 931}, year = {2013}, abstract = {Living cells are complex biological systems transforming metabolites taken up from the surrounding medium. Monitoring the responses of such cells to certain substrate concentrations is a challenging task and offers possibilities to gain insight into the vitality of a community influenced by the growth environment. Cell-based sensors represent a promising platform for monitoring the metabolic activity and thus, the "welfare" of relevant organisms. In the present study, metabolic responses of the model bacterium Escherichia coli in suspension, layered onto a capacitive field-effect structure, were examined to pulses of glucose in the concentration range between 0.05 and 2 mM. It was found that acidification of the surrounding medium takes place immediately after glucose addition and follows Michaelis-Menten kinetic behavior as a function of the glucose concentration. In future, the presented setup can, therefore, be used to study substrate specificities on the enzymatic level and may as well be used to perform investigations of more complex metabolic responses. Conclusions and perspectives highlighting this system are discussed.}, language = {en} } @article{SchoeningPoghossianSchultze2003, author = {Sch{\"o}ning, Michael Josef and Poghossian, Arshak and Schultze, Joachim W.}, title = {Measuring seven parameters by two ISFET modules in a microcell set-up}, series = {Int. Journal of Computational Engineering Science. 4 (2003), H. 2}, journal = {Int. Journal of Computational Engineering Science. 4 (2003), H. 2}, isbn = {1465-8763}, pages = {257 -- 260}, year = {2003}, language = {en} } @article{GasparyanPoghossianVitusevichetal.2011, author = {Gasparyan, Ferdinand V. and Poghossian, Arshak and Vitusevich, Svetlana A. and Petrychuk, Mykhaylo V. and Sydoruk, Viktor A. and Siqueira, Jos{\´e} R. Jr. and Oliveira, Osvaldo N. Jr. and Offenh{\"a}usser, Andreas and Sch{\"o}ning, Michael Josef}, title = {Low-Frequency Noise in Field-Effect Devices Functionalized With Dendrimer/Carbon-Nanotube Multilayers}, series = {IEEE Sensors Journal. 11 (2011), H. 1}, journal = {IEEE Sensors Journal. 11 (2011), H. 1}, publisher = {IEEE}, address = {New York}, isbn = {1530-437X}, pages = {142 -- 149}, year = {2011}, language = {en} } @article{GasparyanPoghossianVitusevichetal.2009, author = {Gasparyan, F. V. and Poghossian, Arshak and Vitusevich, S. A. and Petrychuk, M. V. and Sydoruk, V. A. and Surmalyan, A. V. and Siqueira, J. R. and Oliveira, O. N. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Low Frequency Noise In Electrolyte-Gate Field-Effect Devices Functionalized With Dendrimer/Carbon-Nanotube Multilayers}, series = {Noise and fluctuations : 20th International Conference on Noise and Fluctuations, ICNF 2009, Pisa, Italy, 14 - 19 June 2009 / ed. Massimo Macucci; Giovanni Basso}, journal = {Noise and fluctuations : 20th International Conference on Noise and Fluctuations, ICNF 2009, Pisa, Italy, 14 - 19 June 2009 / ed. Massimo Macucci; Giovanni Basso}, publisher = {American Inst. of Physics}, address = {Melville, NY}, isbn = {9780735406650}, pages = {133 -- 136}, year = {2009}, language = {en} } @article{YoshinobuMiyamotoWerneretal.2017, author = {Yoshinobu, Tatsuo and Miyamoto, Ko-ichiro and Werner, Frederik and Poghossian, Arshak and Wagner, Torsten and Sch{\"o}ning, Michael Josef}, title = {Light-addressable potentiometric sensors for quantitative spatial imaging of chemical species}, series = {Annual Review of Analytical Chemistry}, volume = {10}, journal = {Annual Review of Analytical Chemistry}, publisher = {Annual Reviews}, address = {Palo Alto, Calif.}, issn = {1936-1327}, doi = {10.1146/annurev-anchem-061516-045158}, pages = {225 -- 246}, year = {2017}, abstract = {A light-addressable potentiometric sensor (LAPS) is a semiconductor-based chemical sensor, in which a measurement site on the sensing surface is defined by illumination. This light addressability can be applied to visualize the spatial distribution of pH or the concentration of a specific chemical species, with potential applications in the fields of chemistry, materials science, biology, and medicine. In this review, the features of this chemical imaging sensor technology are compared with those of other technologies. Instrumentation, principles of operation, and various measurement modes of chemical imaging sensor systems are described. The review discusses and summarizes state-of-the-art technologies, especially with regard to the spatial resolution and measurement speed; for example, a high spatial resolution in a submicron range and a readout speed in the range of several tens of thousands of pixels per second have been achieved with the LAPS. The possibility of combining this technology with microfluidic devices and other potential future developments are discussed.}, language = {en} } @incollection{SchoeningWagnerPoghossianetal.2018, author = {Sch{\"o}ning, Michael Josef and Wagner, Torsten and Poghossian, Arshak and Miyamoto, K.I. and Werner, C.F. and Krause, S. and Yoshinobu, T.}, title = {Light-addressable potentiometric sensors for (bio-)chemical sensing and imaging}, series = {Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry. Vol. 7}, booktitle = {Encyclopedia of Interfacial Chemistry: Surface Science and Electrochemistry. Vol. 7}, publisher = {Elsevier}, address = {Amsterdam}, isbn = {9780128097397}, pages = {295 -- 308}, year = {2018}, language = {en} } @article{SiqueiraWernerBaeckeretal.2009, author = {Siqueira, Jose R. and Werner, Frederik and B{\"a}cker, Matthias and Poghossian, Arshak and Zucolotto, Valtencir and Oliveira, Osvaldo N. Jr. and Sch{\"o}ning, Michael Josef}, title = {Layer-by-Layer Assembly of Carbon Nanotubes Incorporated in Light-Addressable Potentiometric Sensors}, series = {Journal of Physical Chemistry C. 113 (2009), H. 33}, journal = {Journal of Physical Chemistry C. 113 (2009), H. 33}, publisher = {American Chemical Society}, address = {Washington, DC}, isbn = {1932-7455}, pages = {14765 -- 14770}, year = {2009}, language = {en} } @article{PoghossianSchoening2014, author = {Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Label-free sensing of biomolecules with field-effect devices for clinical applications}, series = {Electroanalysis}, volume = {26}, journal = {Electroanalysis}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-4109 (E-Journal); 1040-0397 (Print)}, doi = {10.1002/elan.201400073}, pages = {1197 -- 1213}, year = {2014}, abstract = {Among the variety of transducer concepts proposed for label-free detection of biomolecules, the semiconductor field-effect device (FED) is one of the most attractive platforms. As medical techniques continue to progress towards diagnostic and therapies based on biomarkers, the ability of FEDs for a label-free, fast and real-time detection of multiple pathogenic and physiologically relevant molecules with high specificity and sensitivity offers very promising prospects for their application in point-of-care and personalized medicine for an early diagnosis and treatment of diseases. The presented paper reviews recent advances and current trends in research and development of different FEDs for label-free, direct electrical detection of charged biomolecules by their intrinsic molecular charge. The authors are mainly focusing on the detection of the DNA hybridization event, antibody-antigen affinity reaction as well as clinically relevant biomolecules such as cardiac and cancer biomarkers.}, language = {en} } @inproceedings{PoghossianBronderWuetal.2015, author = {Poghossian, Arshak and Bronder, Thomas and Wu, Chunsheng and Sch{\"o}ning, Michael Josef}, title = {Label-free sensing of biomolecules by their intrinsic molecular charge using field-effect devices}, series = {Semiconductor Micro- and Nanoelectonics : Proceedings of the tenth international conference, Yerevan, Armenia, September 11-13}, booktitle = {Semiconductor Micro- and Nanoelectonics : Proceedings of the tenth international conference, Yerevan, Armenia, September 11-13}, isbn = {978-5-8084-1991-9}, pages = {61 -- 63}, year = {2015}, language = {en} } @inproceedings{PoghossianBronderSchejaetal.2016, author = {Poghossian, Arshak and Bronder, Thomas and Scheja, S. and Wu, Chunsheng and Metzger-Boddien, C. and Keusgen, M. and Sch{\"o}ning, Michael Josef}, title = {Label-free Electrostatic Detection of DNA Amplification by PCR Using Capacitive Field-effect Devices}, series = {Procedia Engineering}, volume = {Vol. 168}, booktitle = {Procedia Engineering}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1877-7058}, doi = {10.1016/j.proeng.2016.11.512}, pages = {514 -- 517}, year = {2016}, abstract = {A capacitive field-effect EIS (electrolyte-insulator-semiconductor) sensor modified with a positively charged weak polyelectrolyte of poly(allylamine hydrochloride) (PAH)/single-stranded probe DNA (ssDNA) bilayer has been used for a label-free electrostatic detection of pathogen-specific DNA amplification via polymerase chain reaction (PCR). The sensor is able to distinguish between positive and negative PCR solutions, to detect the existence of target DNA amplicons in PCR samples and thus, can be used as tool for a quick verification of DNA amplification and the successful PCR process.}, language = {en} } @article{WuBronderPoghossianetal.2014, author = {Wu, Chunsheng and Bronder, Thomas and Poghossian, Arshak and Werner, Frederik and B{\"a}cker, Matthias and Sch{\"o}ning, Michael Josef}, title = {Label-free electrical detection of DNA with a multi-spot LAPS: First step towards light-addressable DNA chips}, series = {Physica status solidi A : Applications and materials science}, volume = {211}, journal = {Physica status solidi A : Applications and materials science}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330442}, pages = {1423 -- 1428}, year = {2014}, abstract = {A multi-spot (4 × 4 spots) light-addressable potentiometric sensor (MLAPS) consisting of an Al-p-Si-SiO2 structure has been applied for the label-free electrical detection of DNA (deoxyribonucleic acid) immobilization and hybridization by the intrinsic molecular charge for the first time. Single-stranded probe ssDNA molecules (20 bases) were covalently immobilized onto the silanized SiO2 gate surface. The unspecific adsorption of mismatch ssDNA on the MLAPS gate surface was blocked by bovine serum albumin molecules. To reduce the screening effect and to achieve a high sensor signal, the measurements were performed in a low ionic-strength solution. The photocurrent-voltage (I-V) curves were simultaneously recorded on all 16 spots after each surface functionalization step. Large shifts of I-V curves of 25 mV were registered after the DNA immobilization and hybridization event. In contrast, a small potential shift (∼5 mV) was observed in case of mismatch ssDNA, revealing good specificity of the sensor. The obtained results demonstrate the potential of the MLAPS as promising transducer platform for the multi-spot label-free electrical detection of DNA molecules by their intrinsic molecular charge.}, language = {en} } @article{AbouzarPoghossianCherstvyetal.2012, author = {Abouzar, Maryam H. and Poghossian, Arshak and Cherstvy, Andrey G. and Pedraza, Angela M. and Ingebrandt, Sven and Sch{\"o}ning, Michael Josef}, title = {Label-free electrical detection of DNA by means of field-effect nanoplate capacitors: Experiments and modeling}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100710}, pages = {925 -- 934}, year = {2012}, abstract = {Label-free electrical detection of consecutive deoxyribonucleic acid (DNA) hybridization/denaturation by means of an array of individually addressable field-effect-based nanoplate silicon-on-insulator (SOI) capacitors modified with gold nanoparticles (Au-NP) is investigated. The proposed device detects charge changes on Au-NP/DNA hybrids induced by the hybridization or denaturation event. DNA hybridization was performed in a high ionic-strength solution to provide a high hybridization efficiency. On the other hand, to reduce the screening of the DNA charge by counter ions and to achieve a high sensitivity, the sensor signal induced by the hybridization and denaturation events was measured in a low ionic-strength solution. High sensor signals of about 120, 90, and 80 mV were registered after the DNA hybridization, denaturation, and re-hybridization events, respectively. Fluorescence microscopy has been applied as reference method to verify the DNA immobilization, hybridization, and denaturation processes. An electrostatic charge-plane model for potential changes at the gate surface of a nanoplate field-effect sensor induced by the DNA hybridization has been developed taking into account both the Debye length and the distance of the DNA charge from the gate surface.}, language = {en} } @article{AbouzarPedrazaSchoeningetal.2010, author = {Abouzar, Maryam H. and Pedraza, A. M. and Sch{\"o}ning, Michael Josef and Poghossian, Arshak}, title = {Label-free DNA hybridization and denaturation detection by means of field-effect nanoplate SOI capacitors functionalized with gold nanoparticles}, series = {Procedia Engineering. 5 (2010)}, journal = {Procedia Engineering. 5 (2010)}, isbn = {1877-7058}, pages = {918 -- 921}, year = {2010}, language = {en} }