@article{PicardBrillCasseletal.2002, author = {Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus and K{\"a}mper, Klaus-Peter and Merten, Sabine}, title = {Neue Medien f{\"u}r die praktische MST-Ausbildung}, organization = {FH-Kaiserslautern}, year = {2002}, abstract = {Im Studiengang Mikrosystemtechnik des Fachhochschulstandortes Zweibr{\"u}cken werden zwei neue moderne Anlagen f{\"u}r die Herstellung von mikrotechnischen Komponenten in Betrieb genommen: Ein Oxidationsofen f{\"u}r Herstellung d{\"u}nner Oxidschichten auf Silizium-Einkristallen und eine Belichtungsapparatur f{\"u}r die Fotolithografie - das Besondere an diesen Anlagen: Sie existieren nur virtuell, d.h. als Animationen in einer Computerwelt.}, subject = {Mikrosystemtechnik}, language = {de} } @inproceedings{MertenKaemperBrilletal.2003, author = {Merten, Sabine and K{\"a}mper, Klaus-Peter and Brill, Manfred and Picard, Antoni and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus}, title = {Virtuelle Sensor-Fertigung: Hightech mit LabVIEW}, year = {2003}, abstract = {Eine neue Generation von Praktika an Hochschulen w{\"a}chst heran. Moderne Wege beim Verstehen und Erlernen naturwissenschaftlicher Zusammenh{\"a}nge sowie industrieller Fertigungsprozesse sind gefordert. Das Technologiepraktikum „Virtuelle Sensor- Fertigung", entwickelt im Verbundprojekt INGMEDIA an den Fachhochschulen Aachen und Zweibr{\"u}cken, tr{\"a}gt als neuartiges Lern- und Lehrmodul dieser Forderung Rechnung. Die Studierenden lernen einen vollst{\"a}ndigen Fertigungsprozess mit Hilfe von virtuellen, in LabVIEW programmierten Maschinen kennen, bevor sie die reale Prozesskette im Reinraum durchf{\"u}hren.}, subject = {LabVIEW}, language = {de} } @inproceedings{MertenKaemperBrilletal.2003, author = {Merten, Sabine and K{\"a}mper, Klaus-Peter and Brill, Manfred and Picard, Antoni and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus}, title = {Vom virtuellen Wafer zum realen Drucksensor}, year = {2003}, abstract = {Das Technologiepraktikum „Virtuelle Sensor-Fertigung" ist ein Beispiel f{\"u}r die medientechnische Aufbereitung von Lern- und Lehrmaterial unter didaktischen Gesichtspunkten. Studierende lernen einen Fertigungsprozess mit Hilfe von virtuellen Maschinen kennen, bevor sie die reale Prozesskette im Laborpraktikum im Reinraum durchf{\"u}hren.}, subject = {Virtuelle Maschine}, language = {de} } @inproceedings{MertenConradKaemperetal.2006, author = {Merten, Sabine and Conrad, Thorsten and K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries}, year = {2006}, abstract = {Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R\&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.}, subject = {Virtuelles Laboratorium}, language = {en} } @article{KaemperThuerigenEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Th{\"u}rigen, C. and Ehrfeld, W. and Hagemann, B.}, title = {Gesichtspunkte beim Miniaturisieren von Umlaufr{\"a}dergetrieben. Th{\"u}rigen, C.; Ehrfeld, W. ; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {235}, year = {1996}, language = {de} } @article{KaemperSchulzEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Ehrfeld, W. and Erbel, R.}, title = {LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, journal = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, publisher = {REPRO EPFL}, address = {Lausanne}, pages = {Getr. Z{\"a}hlung : Ill., graph. Darst.}, year = {1994}, language = {en} } @article{KaemperSchulzArnoldetal.1995, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Arnold, J. and Detter, H.}, title = {Anwendungen der LIGA-Technik f{\"u}r medizinische Diagnose- und Therapiesysteme. Schulz, C.; Arnold, J.; Detter, H.; D{\"o}pper, J.; Ehrfeld, W., Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, journal = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, isbn = {0932-383X}, pages = {493}, year = {1995}, language = {de} } @article{KaemperSchmittWesneretal.1989, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and Wesner, D. A. and G{\"u}ntherodt, G.}, title = {Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers}, series = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, journal = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, isbn = {1432-0630}, pages = {573 -- 578}, year = {1989}, language = {en} } @article{KaemperSchmittGuentherodtetal.1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G. and Gambino, R. J.}, title = {CrO2—A New Half-Metallic Ferromagnet? K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.; Gambino, R. J., Ruf, R.}, series = {Physical Review Letters. 59 (1987), H. 24}, journal = {Physical Review Letters. 59 (1987), H. 24}, isbn = {1079-7114}, pages = {2788 -- 2791}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Surface Science. 189/190 (1987)}, journal = {Surface Science. 189/190 (1987)}, isbn = {0039-6028}, pages = {741 -- 507}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Physical Review B. 36 (1987), H. 7}, journal = {Physical Review B. 36 (1987), H. 7}, isbn = {1095-3795}, pages = {3763 -- 3768}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Thickness dependence of the electronic structure of ultrathin, epitaxial Ni(111)/W(110) layers.}, series = {Physical Review B. 38 (1988), H. 14}, journal = {Physical Review B. 38 (1988), H. 14}, isbn = {1095-3795}, pages = {9451 -- 9456}, year = {1988}, language = {en} } @article{KaemperSchmittGuentherodt1990, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature and wave-vector dependence of the spin-split band structure of Ni(111) along the \&\#915;-L line}, series = {Physical Review B. 42 (1990), H. 16}, journal = {Physical Review B. 42 (1990), H. 16}, isbn = {1095-3795}, pages = {10696 -- 10705}, year = {1990}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature dependence of the exchange splitting of Ni along the \&\#61511;-L line}, series = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, journal = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, pages = {39 -- 40}, year = {1988}, language = {en} } @article{KaemperPicardSchuetze2007, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {K{\"o}nnen Studierende einen piezoresistiven Drucksensor in einer Woche selbst{\"a}ndig fertigen?}, series = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, journal = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, publisher = {AWNET}, address = {Berlin}, isbn = {978-3-89750-148-5}, pages = {26 -- 35}, year = {2007}, language = {de} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {The Virtual Cleanroom - a new tool in teaching MST process technologies}, series = {mst news International newsletter on micro - nano Integration (2003)}, journal = {mst news International newsletter on micro - nano Integration (2003)}, isbn = {0948-3128}, pages = {35 -- 36}, year = {2003}, language = {en} } @article{KaemperPicardBrilletal.2002, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {Neue Medien f{\"u}r die praktische MST Ausbildung}, series = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, journal = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, pages = {14 -- 15}, year = {2002}, language = {de} } @article{KaemperPicardSchuetzeetal.2006, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A. and Wallach, D.}, title = {Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.; Wallach, D.; Walter, T.}, series = {Mst-News (2006)}, journal = {Mst-News (2006)}, isbn = {0948-3128}, pages = {15, 16 -- u. 35}, year = {2006}, language = {en} } @article{KaemperPicardSchuetze2005, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A.}, title = {Die Ausbildungsfoundry pro-mst und das virtuelle Technologielabor: Ein Konzept f{\"u}r eine exzellente praktische MST-Ausbildung in einem modernen Reinraum zu niedrigen Gesamtkosten. Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.}, series = {Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg ; gemeinsame Veranstaltung von: Bundesministerium f{\"u}r Bildung und Forschung (BMBF) ... / organisiert von: GMM VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ... Chairman: Roland Zengerle}, journal = {Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg ; gemeinsame Veranstaltung von: Bundesministerium f{\"u}r Bildung und Forschung (BMBF) ... / organisiert von: GMM VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ... Chairman: Roland Zengerle}, publisher = {VDE-Verl.}, address = {Berlin}, isbn = {3-8007-2926-1}, pages = {127}, year = {2005}, language = {de} }