@article{KarschuckKaulenPoghossianetal.2021, author = {Karschuck, Tobias and Kaulen, Corinna and Poghossian, Arshak and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {Gold nanoparticle-modified capacitive field-effect sensors: Studying the surface density of nanoparticles and coupling of charged polyelectrolyte macromolecules}, series = {Electrochemical Science Advances}, volume = {2}, journal = {Electrochemical Science Advances}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {0938-5193}, doi = {10.1002/elsa.202100179}, pages = {10 Seiten}, year = {2021}, abstract = {The coupling of ligand-stabilized gold nanoparticles with field-effect devices offers new possibilities for label-free biosensing. In this work, we study the immobilization of aminooctanethiol-stabilized gold nanoparticles (AuAOTs) on the silicon dioxide surface of a capacitive field-effect sensor. The terminal amino group of the AuAOT is well suited for the functionalization with biomolecules. The attachment of the positively-charged AuAOTs on a capacitive field-effect sensor was detected by direct electrical readout using capacitance-voltage and constant capacitance measurements. With a higher particle density on the sensor surface, the measured signal change was correspondingly more pronounced. The results demonstrate the ability of capacitive field-effect sensors for the non-destructive quantitative validation of nanoparticle immobilization. In addition, the electrostatic binding of the polyanion polystyrene sulfonate to the AuAOT-modified sensor surface was studied as a model system for the label-free detection of charged macromolecules. Most likely, this approach can be transferred to the label-free detection of other charged molecules such as enzymes or antibodies.}, language = {en} } @article{KarschuckFilipovBollellaetal.2019, author = {Karschuck, T. L. and Filipov, Y. and Bollella, P. and Sch{\"o}ning, Michael Josef and Katz, E.}, title = {Not-XOR (NXOR) logic gate based on an enzyme-catalyzed reaction}, series = {International Journal of Unconventional Computing}, volume = {14}, journal = {International Journal of Unconventional Computing}, number = {3-4}, publisher = {Old City Publishing}, address = {Philadelphia}, issn = {1548-7199}, pages = {235 -- 242}, year = {2019}, abstract = {Enzyme-catalyzed reactions have been designed to mimic various Boolean logic gates in the general framework of unconventional biomolecular computing. While some of the logic gates, particularly OR, AND, are easy to realize with biocatalytic reactions and have been reported in numerous publications, some other, like NXOR, are very challenging and have not been realized yet with enzyme reactions. The paper reports on a novel approach to mimicking the NXOR logic gate using the bell-shaped enzyme activity dependent on pH values. Shifting pH from the optimum value to the acidic or basic values by using acid or base inputs (meaning 1,0 and 0,1 inputs) inhibits the enzyme reaction, while keeping the optimum pH (assuming 0,0 and 1,1 input combinations) preserves a high enzyme activity. The challenging part of the present approach is the selection of an enzyme with a well-demonstrated bell-shape activity dependence on the pH value. While many enzymes can satisfy this condition, we selected pyrroloquinoline quinone (PQQ)-dependent glucose dehydrogenase as this enzyme has the optimum pH center-located on the pH scale allowing the enzyme activity change by the acidic and basic pH shift from the optimum value corresponding to the highest activity. The present NXOR gate is added to the biomolecular "toolbox" as a new example of Boolean logic gates based on enzyme reactions.}, language = {en} } @article{JildehWagnerSchoeningetal.2015, author = {Jildeh, Zaid B. and Wagner, Torsten and Sch{\"o}ning, Michael Josef and Pieper, Martin}, title = {Simulating the electromagnetic-thermal treatment of thin aluminium layers for adhesion improvement}, series = {Physica status solidi (a)}, volume = {Vol. 212}, journal = {Physica status solidi (a)}, number = {6}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201431893}, pages = {1234 -- 1241}, year = {2015}, abstract = {A composite layer material used in packaging industry is made from joining layers of different materials using an adhesive. An important processing step in the production of aluminium-containing composites is the surface treatment and consequent coating of adhesive material on the aluminium surface. To increase adhesion strength between aluminium layer and the adhesive material, the foil is heat treated. For efficient heating, induction heating was considered as state-of-the-art treatment process. Due to the complexity of the heating process and the unpredictable nature of the heating source, the control of the process is not yet optimised. In this work, a finite element analysis of the process was established and various process parameters were studied. The process was simplified and modelled in 3D. The numerical model contains an air domain, an aluminium layer and a copper coil fitted with a magnetic field concentrating material. The effect of changing the speed of the aluminium foil (or rolling speed) was studied with the change of the coil current. Statistical analysis was used for generating a general control equation of coil current with changing rolling speed.}, language = {en} } @article{JildehOberlaenderKirchneretal.2018, author = {Jildeh, Zaid B. and Oberl{\"a}nder, Jan and Kirchner, Patrick and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {Thermocatalytic Behavior of Manganese (IV) Oxide as Nanoporous Material on the Dissociation of a Gas Mixture Containing Hydrogen Peroxide}, series = {Nanomaterials}, volume = {8}, journal = {Nanomaterials}, number = {4}, publisher = {MDPI}, address = {Basel}, issn = {2079-4991}, doi = {10.3390/nano8040262}, pages = {Artikel 262}, year = {2018}, abstract = {In this article, we present an overview on the thermocatalytic reaction of hydrogen peroxide (H₂O₂) gas on a manganese (IV) oxide (MnO₂) catalytic structure. The principle of operation and manufacturing techniques are introduced for a calorimetric H₂O₂ gas sensor based on porous MnO₂. Results from surface analyses by X-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM) of the catalytic material provide indication of the H₂O₂ dissociation reaction schemes. The correlation between theory and the experiments is documented in numerical models of the catalytic reaction. The aim of the numerical models is to provide further information on the reaction kinetics and performance enhancement of the porous MnO₂ catalyst.}, language = {en} } @article{JildehOberlaenderKirchneretal.2018, author = {Jildeh, Zaid B. and Oberl{\"a}nder, Jan and Kirchner, Patrick and Keusgen, Michael and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {Experimental and Numerical Analyzes of a Sensor Based on Interdigitated Electrodes for Studying Microbiological Alterations}, series = {physica status solidi (a): applications and materials science}, volume = {215}, journal = {physica status solidi (a): applications and materials science}, number = {15}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201700920}, pages = {Artikel 1700920}, year = {2018}, abstract = {In this work, a cell-based biosensor to evaluate the sterilization efficacy of hydrogen peroxide vapor sterilization processes is characterized. The transducer of the biosensor is based on interdigitated gold electrodes fabricated on an inert glass substrate. Impedance spectroscopy is applied to evaluate the sensor behavior and the alteration of test microorganisms due to the sterilization process. These alterations are related to changes in relative permittivity and electrical conductivity of the bacterial spores. Sensor measurements are conducted with and without bacterial spores (Bacillus atrophaeus), as well as after an industrial sterilization protocol. Equivalent two-dimensional numerical models based on finite element method of the periodic finger structures of the interdigitated gold electrodes are designed and validated using COMSOL® Multiphysics software by the application of known dielectric properties. The validated models are used to compute the electrical properties at different sensor states (blank, loaded with spores, and after sterilization). As a final result, we will derive and tabulate the frequency-dependent electrical parameters of the spore layer using a novel model that combines experimental data with numerical optimization techniques.}, language = {en} } @article{JildehKirchnerOberlaenderetal.2020, author = {Jildeh, Zaid B. and Kirchner, Patrick and Oberl{\"a}nder, Jan and Vahidpour, Farnoosh and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {Development of a package-sterilization process for aseptic filling machines: A numerical approach and validation for surface treatment with hydrogen peroxide}, series = {Sensor and Actuators A: Physical}, volume = {303}, journal = {Sensor and Actuators A: Physical}, number = {111691}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0924-4247}, doi = {10.1016/j.sna.2019.111691}, year = {2020}, abstract = {Within the present work a sterilization process by a heated gas mixture that contains hydrogen peroxide (H₂O₂) is validated by experiments and numerical modeling techniques. The operational parameters that affect the sterilization efficacy are described alongside the two modes of sterilization: gaseous and condensed H₂O₂. Measurements with a previously developed H₂O₂ gas sensor are carried out to validate the applied H₂O₂ gas concentration during sterilization. We performed microbiological tests at different H₂O₂ gas concentrations by applying an end-point method to carrier strips, which contain different inoculation loads of Geobacillus stearothermophilus spores. The analysis of the sterilization process of a pharmaceutical glass vial is performed by numerical modeling. The numerical model combines heat- and advection-diffusion mass transfer with vapor-pressure equations to predict the location of condensate formation and the concentration of H₂O₂ at the packaging surfaces by changing the gas temperature. For a sterilization process of 0.7 s, a H₂O₂ gas concentration above 4\% v/v is required to reach a log-count reduction above six. The numerical results showed the location of H₂O₂ condensate formation, which decreases with increasing sterilant-gas temperature. The model can be transferred to different gas nozzle- and packaging geometries to assure the absence of H₂O₂ residues.}, language = {en} } @article{JildehKirchnerOberlaenderetal.2017, author = {Jildeh, Zaid B. and Kirchner, Patrick and Oberl{\"a}nder, Jan and Kremers, Alexander and Wagner, Torsten and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {FEM-based modeling of a calorimetric gas sensor for hydrogen peroxide monitoring}, series = {physica status solidi a : applications and materials sciences}, journal = {physica status solidi a : applications and materials sciences}, number = {Early View}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201600912}, year = {2017}, abstract = {A physically coupled finite element method (FEM) model is developed to study the response behavior of a calorimetric gas sensor. The modeled sensor serves as a monitoring device of the concentration of gaseous hydrogen peroxide (H2 O2) in a high temperature mixture stream in aseptic sterilization processes. The principle of operation of a calorimetric H2 O2 sensor is analyzed and the results of the numerical model have been validated by using previously published sensor experiments. The deviation in the results between the FEM model and experimental data are presented and discussed.}, language = {en} } @article{JildehKirchnerBaltesetal.2019, author = {Jildeh, Zaid B. and Kirchner, Patrick and Baltes, Klaus and Wagner, Patrick H. and Sch{\"o}ning, Michael Josef}, title = {Development of an in-line evaporation unit for the production of gas mixtures containing hydrogen peroxide - numerical modeling and experimental results}, series = {International Journal of Heat and Mass Transfer}, volume = {143}, journal = {International Journal of Heat and Mass Transfer}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0017-9310}, doi = {10.1016/j.ijheatmasstransfer.2019.118519}, pages = {Article number 118519}, year = {2019}, abstract = {Hydrogen peroxide (H2O2) is a typical surface sterilization agent for packaging materials used in the pharmaceutical, food and beverage industries. We use the finite-elements method to analyze the conceptual design of an in-line thermal evaporation unit to produce a heated gas mixture of air and evaporated H2O2 solution. For the numerical model, the required phase-transition variables of pure H2O2 solution and of the aerosol mixture are acquired from vapor-liquid equilibrium (VLE) diagrams derived from vapor-pressure formulations. This work combines homogeneous single-phase turbulent flow with heat-transfer physics to describe the operation of the evaporation unit. We introduce the apparent heat-capacity concept to approximate the non-isothermal phase-transition process of the H2O2-containing aerosol. Empirical and analytical functions are defined to represent the temperature- and pressure-dependent material properties of the aqueous H2O2 solution, the aerosol and the gas mixture. To validate the numerical model, the simulation results are compared to experimental data on the heating power required to produce the gas mixture. This shows good agreement with the deviations below 10\%. Experimental observations on the formation of deposits due to the evaporation of stabilized H2O2 solution fits the prediction made from simulation results.}, language = {en} } @article{JablonskiPoghossianSeverinetal.2021, author = {Jablonski, Melanie and Poghossian, Arshak and Severin, Robin and Keusgen, Michael and Wege, Christian and Sch{\"o}ning, Michael Josef}, title = {Capacitive Field-Effect Biosensor Studying Adsorption of Tobacco Mosaic Virus Particles}, series = {Micromachines}, volume = {12}, journal = {Micromachines}, number = {1}, publisher = {MDPI}, address = {Basel}, doi = {10.3390/mi12010057}, pages = {Artikel 57}, year = {2021}, abstract = {Plant virus-like particles, and in particular, tobacco mosaic virus (TMV) particles, are increasingly being used in nano- and biotechnology as well as for biochemical sensing purposes as nanoscaffolds for the high-density immobilization of receptor molecules. The sensitive parameters of TMV-assisted biosensors depend, among others, on the density of adsorbed TMV particles on the sensor surface, which is affected by both the adsorption conditions and surface properties of the sensor. In this work, Ta₂O₅-gate field-effect capacitive sensors have been applied for the label-free electrical detection of TMV adsorption. The impact of the TMV concentration on both the sensor signal and the density of TMV particles adsorbed onto the Ta₂O₅-gate surface has been studied systematically by means of field-effect and scanning electron microscopy methods. In addition, the surface density of TMV particles loaded under different incubation times has been investigated. Finally, the field-effect sensor also demonstrates the label-free detection of penicillinase immobilization as model bioreceptor on TMV particles.}, language = {en} } @article{ItabashiKosakaMiyamotoetal.2013, author = {Itabashi, Akinori and Kosaka, Naoki and Miyamoto, Ko-ichiro and Wagner, Torsten and Sch{\"o}ning, Michael Josef}, title = {High-speed chemical imaging system based on front-side-illuminated LAPS}, series = {Sensors and actuators B: Chemical}, volume = {182}, journal = {Sensors and actuators B: Chemical}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1873-3077}, doi = {10.1016/j.snb.2013.03.016}, pages = {315 -- 321}, year = {2013}, abstract = {The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the spatial distribution of specific ions on the sensing surface. The conventional chemical imaging system based on the light-addressable potentiometric sensor (LAPS), however, required a long time to obtain a chemical image, due to the slow mechanical scan of a single light beam. For high-speed imaging, a plurality of light beams modulated at different frequencies can be employed to measure the ion concentrations simultaneously at different locations on the sensor plate by frequency division multiplex (FDM). However, the conventional measurement geometry of back-side illumination limited the bandwidth of the modulation frequency required for FDM measurement, because of the low-pass filtering characteristics of carrier diffusion in the Si substrate. In this study, a high-speed chemical imaging system based on front-side-illuminated LAPS was developed, which achieved high-speed spatiotemporal recording of pH change at a rate of 70 frames per second.}, language = {en} } @article{IsmailHaradaYoshinobuetal.2000, author = {Ismail, A.B.M. and Harada, T. and Yoshinobu, T. and Iwasaki, H. and Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Investigation of pulsed laser-deposited Al2O3 as a high pH-sensitive layer for LAPS-based biosensing applications}, series = {Sensors and Actuators B. 71 (2000), H. 3}, journal = {Sensors and Actuators B. 71 (2000), H. 3}, isbn = {0925-4005}, pages = {169 -- 172}, year = {2000}, language = {en} } @article{IngebrandtHanNakamuraetal.2007, author = {Ingebrandt, S. and Han, Y. and Nakamura, F. and Poghossian, Arshak and Sch{\"o}ning, Michael Josef and Offenh{\"a}usser, A.}, title = {Label-free detection of single nucleotide polymorphisms utilizing the differential transfer function of field-effect transistors}, series = {Biosensors and Bioelectronics. 22 (2007), H. 12}, journal = {Biosensors and Bioelectronics. 22 (2007), H. 12}, isbn = {0956-5663}, pages = {2834 -- 2840}, year = {2007}, language = {en} } @article{ImmelGruetzkeSpaeteetal.2012, author = {Immel, Timo and Gr{\"u}tzke, Martin and Sp{\"a}te, Anne-Katrin and Groth, Ulrich and {\"O}hlschl{\"a}ger, Peter and Huhn, Thomas}, title = {Synthesis and X-ray structure analysis of a heptacoordinate titanium(IV)-bis-chelate with enhanced in vivo antitumor efficacy}, series = {Chemical Communications}, volume = {48}, journal = {Chemical Communications}, number = {46}, publisher = {Royal Society of Chemistry}, address = {Cambridge}, issn = {1364-548X}, doi = {10.1039/C2CC31624B}, pages = {5790 -- 5792}, year = {2012}, abstract = {Chelate stabilization of a titanium(IV)-salan alkoxide by ligand exchange with 2,6-pyridinedicarboxylic acid (dipic) resulted in heptacoordinate complex 3 which is not redox-active, stable on silica gel and has increased aqueous stability. 3 is highly toxic in HeLa S3 and Hep G2 and has enhanced antitumor efficacy in a mouse cervical-cancer model.}, language = {en} } @article{IkenKirsanovLeginetal.2012, author = {Iken, Heiko and Kirsanov, D. and Legin, A. and Sch{\"o}ning, Michael Josef}, title = {Novel Thin-Film Polymeric Materials for the Detection of Heavy Metals}, series = {Procedia Engineering}, journal = {Procedia Engineering}, number = {47}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1877-7058}, doi = {10.1016/j.proeng.2012.09.148}, pages = {322 -- 325}, year = {2012}, abstract = {A variety of transition metals, e.g., copper, zinc, cadmium, lead, etc. are widely used in industry as components for wires, coatings, alloys, batteries, paints and so on. The inevitable presence of transition metals in industrial processes implies the ambition of developing a proper analytical technique for their adequate monitoring. Most of these elements, especially lead and cadmium, are acutely toxic for biological organisms. Quantitative determination of these metals at low activity levels in different environmental and industrial samples is therefore a vital task. A promising approach to achieve an at-side or on-line monitoring on a miniaturized and cost efficient way is the combination of a common potentiometric sensor array with heavy metal-sensitive thin-film materials, like chalcogenide glasses and polymeric materials, respectively.}, language = {en} } @article{IkenBronderGoretzkietal.2019, author = {Iken, Heiko and Bronder, Thomas and Goretzki, Alexander and Kriesel, Jana and Ahlborn, Kristina and Gerlach, Frank and Vonau, Winfried and Zander, Willi and Schubert, J{\"u}rgen and Sch{\"o}ning, Michael Josef}, title = {Development of a Combined pH- and Redox-Sensitive Bi-Electrode Glass Thin-Film Sensor}, series = {physica status solidi a : applications and materials sciences}, volume = {216}, journal = {physica status solidi a : applications and materials sciences}, number = {12}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201900114}, pages = {1 -- 8}, year = {2019}, language = {en} } @article{IkenAhlbornGerlachetal.2013, author = {Iken, Heiko and Ahlborn, K. and Gerlach, F. and Vonau, W. and Zander, W. and Schubert, J. and Sch{\"o}ning, Michael Josef}, title = {Development of redox glasses and subsequent processing by means of pulsed laser deposition for realizing silicon-based thin-film sensors}, series = {Electrochimica acta}, journal = {Electrochimica acta}, publisher = {Elsevier}, address = {Amsterdam}, issn = {1873-3859 (E-Journal); 0013-4686 (Print)}, pages = {Available online 30.8.2013}, year = {2013}, language = {en} } @article{HuellenkremerGlueckEmonsetal.2000, author = {H{\"u}llenkremer, B. and Gl{\"u}ck, O. and Emons, H. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Voltohmmetrie an polykristallinen Goldelektroden}, series = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Meßsysteme 2000 : Tagung Ludwigsburg, 13. und 14. M{\"a}rz 2000 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik}, journal = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Meßsysteme 2000 : Tagung Ludwigsburg, 13. und 14. M{\"a}rz 2000 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf:}, isbn = {3-18-091530-7}, pages = {45 -- 54}, year = {2000}, language = {de} } @article{HuckSchiffelsHerreraetal.2013, author = {Huck, Christina and Schiffels, Johannes and Herrera, Cony N. and Schelden, Maximilian and Selmer, Thorsten and Poghossian, Arshak and Baumann, Marcus and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Metabolic responses of Escherichia coli upon glucose pulses captured by a capacitive field-effect sensor}, series = {Physica Status Solidi (A)}, volume = {210}, journal = {Physica Status Solidi (A)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {0031-8965}, doi = {10.1002/pssa.201200900}, pages = {926 -- 931}, year = {2013}, abstract = {Living cells are complex biological systems transforming metabolites taken up from the surrounding medium. Monitoring the responses of such cells to certain substrate concentrations is a challenging task and offers possibilities to gain insight into the vitality of a community influenced by the growth environment. Cell-based sensors represent a promising platform for monitoring the metabolic activity and thus, the "welfare" of relevant organisms. In the present study, metabolic responses of the model bacterium Escherichia coli in suspension, layered onto a capacitive field-effect structure, were examined to pulses of glucose in the concentration range between 0.05 and 2 mM. It was found that acidification of the surrounding medium takes place immediately after glucose addition and follows Michaelis-Menten kinetic behavior as a function of the glucose concentration. In future, the presented setup can, therefore, be used to study substrate specificities on the enzymatic level and may as well be used to perform investigations of more complex metabolic responses. Conclusions and perspectives highlighting this system are discussed.}, language = {en} } @article{HuckPoghossianWagneretal.2012, author = {Huck, Christina and Poghossian, Arshak and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Combined amperometric/field-effect sensor for the detection of dissolved hydrogen}, series = {Sensors and actuators B: Chemical}, volume = {187}, journal = {Sensors and actuators B: Chemical}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0925-4005}, doi = {10.1016/j.snb.2012.10.050}, pages = {168 -- 173}, year = {2012}, abstract = {Real-time and reliable monitoring of the biogas process is crucial for a stable and efficient operation of biogas production in order to avoid digester breakdowns. The concentration of dissolved hydrogen (H₂) represents one of the key parameters for biogas process control. In this work, a one-chip integrated combined amperometric/field-effect sensor for monitoring the dissolved H₂ concentration has been developed for biogas applications. The combination of two different transducer principles might allow a more accurate and reliable measurement of dissolved H₂ as an early warning indicator of digester failures. The feasibility of the approach has been demonstrated by simultaneous amperometric/field-effect measurements of dissolved H₂ concentrations in electrolyte solutions. Both, the amperometric and the field-effect transducer show a linear response behaviour in the H₂ concentration range from 0.1 to 3\% (v/v) with a slope of 198.4 ± 13.7 nA/\% (v/v) and 14.9 ± 0.5 mV/\% (v/v), respectively.}, language = {en} } @article{HuckPoghossianKerroumietal.2014, author = {Huck, Christina and Poghossian, Arshak and Kerroumi, Iman and Schusser, Sebastian and B{\"a}cker, Matthias and Zander, Willi and Schubert, J{\"u}rgen and Buniatyan, Vahe V. and Martirosyan, Norayr W. and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material}, series = {Electroanalysis}, volume = {26}, journal = {Electroanalysis}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-4109 (E-Journal); 1040-0397 (Print)}, doi = {10.1002/elan.201400076}, pages = {980 -- 987}, year = {2014}, abstract = {It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.}, language = {en} }