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G. and L{\"u}th, H.}, title = {Pulsed laser deposition - an innovative technique for preparing inorganic thin films}, series = {Electroanalysis. 13 (2001), H. 8-9}, journal = {Electroanalysis. 13 (2001), H. 8-9}, isbn = {1040-0397}, pages = {727 -- 732}, year = {2001}, language = {en} } @article{SchoeningSchaubZundeletal.1995, author = {Sch{\"o}ning, Michael Josef and Schaub, A. and Zundel, A. and Beckers, L. and Schubert, J. and Zander, W. and Kordos, P. and L{\"u}th, H.}, title = {Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors}, series = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff}, journal = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff}, publisher = {Ed. 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