@article{KaemperLehrEhrfeldetal.1997, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulz, C.; Th{\"u}rigen C.}, series = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, journal = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, isbn = {1364-5706}, year = {1997}, language = {en} } @article{KaemperLehrEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Entwicklung von Mikroantrieben am Institut f{\"u}r Mikrotechnik Mainz. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {77}, year = {1996}, language = {de} } @article{KaemperLehrEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Michel, F.}, title = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.}, series = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, journal = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, address = {Piscataway, N.J.}, isbn = {0780321146}, pages = {43 -- 47}, year = {1994}, language = {en} }