@article{KaemperDoepperEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Oberbeck, S.}, title = {A self-filling low-cost membrane micropump}, series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {078034412X}, pages = {432 -- 437}, year = {1998}, language = {en} } @article{KaemperPicardSchuetzeetal.2006, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A. and Wallach, D.}, title = {Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.; Wallach, D.; Walter, T.}, series = {Mst-News (2006)}, journal = {Mst-News (2006)}, isbn = {0948-3128}, pages = {15, 16 -- u. 35}, year = {2006}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; K{\"a}mper, K.-P.; Dasbach, U.; D{\"o}pper, J.; Ehrfeld, W.; Kaupert, M.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {275}, year = {1995}, language = {en} } @article{KaemperSchulzArnoldetal.1995, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Arnold, J. and Detter, H.}, title = {Anwendungen der LIGA-Technik f{\"u}r medizinische Diagnose- und Therapiesysteme. Schulz, C.; Arnold, J.; Detter, H.; D{\"o}pper, J.; Ehrfeld, W., Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, journal = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, isbn = {0932-383X}, pages = {493}, year = {1995}, language = {de} } @article{KaemperLehrAbeletal.1995, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, journal = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, publisher = {Fuji Technology Press}, pages = {31 -- 31}, year = {1995}, language = {en} } @article{KaemperHagemannEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Ehrfeld, W. and Lehr, H.}, title = {Berechnung und Optimierung von Permanentmagnet-Mikromotoren mit Hilfe der Finite-Elemente-Methode. Hagemann, B.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, journal = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, pages = {1 -- 13}, year = {1996}, language = {de} } @article{KaemperSchmittGuentherodtetal.1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G. and Gambino, R. J.}, title = {CrO2—A New Half-Metallic Ferromagnet? K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.; Gambino, R. J., Ruf, R.}, series = {Physical Review Letters. 59 (1987), H. 24}, journal = {Physical Review Letters. 59 (1987), H. 24}, isbn = {1079-7114}, pages = {2788 -- 2791}, year = {1987}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {37 -- 40}, year = {1996}, language = {en} } @article{KaemperLehrEhrfeldetal.1997, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulz, C.; Th{\"u}rigen C.}, series = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, journal = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, isbn = {1364-5706}, year = {1997}, language = {en} } @article{KaemperPicardSchuetze2005, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A.}, title = {Die Ausbildungsfoundry pro-mst und das virtuelle Technologielabor: Ein Konzept f{\"u}r eine exzellente praktische MST-Ausbildung in einem modernen Reinraum zu niedrigen Gesamtkosten. Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.}, series = {Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg ; gemeinsame Veranstaltung von: Bundesministerium f{\"u}r Bildung und Forschung (BMBF) ... / organisiert von: GMM VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ... Chairman: Roland Zengerle}, journal = {Mikrosystemtechnik-Kongress 2005 : 10. bis 12. Oktober 2005 in Freiburg ; gemeinsame Veranstaltung von: Bundesministerium f{\"u}r Bildung und Forschung (BMBF) ... / organisiert von: GMM VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik ... Chairman: Roland Zengerle}, publisher = {VDE-Verl.}, address = {Berlin}, isbn = {3-8007-2926-1}, pages = {127}, year = {2005}, language = {de} } @article{Kaemper2002, author = {K{\"a}mper, Klaus-Peter}, title = {Die Mikroaktorik wird erwachsen}, series = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, journal = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, pages = {4 -- 5}, year = {2002}, language = {de} } @article{Kaemper2003, author = {K{\"a}mper, Klaus-Peter}, title = {Education and Training in MST. K{\"a}mper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M.}, series = {Mst-News (2003)}, journal = {Mst-News (2003)}, isbn = {0948-3128}, pages = {35}, year = {2003}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Physical Review B. 36 (1987), H. 7}, journal = {Physical Review B. 36 (1987), H. 7}, isbn = {1095-3795}, pages = {3763 -- 3768}, year = {1987}, language = {en} } @article{KaemperHagemannEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Ehrfeld, W. and Lehr, H.}, title = {Einsatz der Finite-Elemente-Methode f{\"u}r die Entwicklung von Permanentmagnet-Mikromotoren. Hagemann, B.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {Tagungsband : 3. Workshop Methoden- und Werkzeuge zum Entwurf von Mikrosystemen mit dem Schwerpunkt Methoden zum Entwurf, zur Integration und Parametrisierung von Komponenten f{\"u}r Applikationsspezifische Integrierte Mikrosysteme : 27. und 28. Juni 1996, VDE-Haus Frankfurt a. M.}, journal = {Tagungsband : 3. Workshop Methoden- und Werkzeuge zum Entwurf von Mikrosystemen mit dem Schwerpunkt Methoden zum Entwurf, zur Integration und Parametrisierung von Komponenten f{\"u}r Applikationsspezifische Integrierte Mikrosysteme : 27. und 28. Juni 1996, VDE-Haus Frankfurt a. M.}, publisher = {C-LAB/Analoge Systemtechnik, 1996}, address = {Paderborn}, pages = {225 S. : graph. Darst.}, year = {1996}, language = {de} } @article{KaemperEhrfeldHagemannetal.1996, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hagemann, B. and Lehr, H.}, title = {Electromagnetic permanent magnet micromotor with integrated micro gear box. K{\"a}mper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Th{\"u}rigen, C.; Wittig, T.}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {429}, year = {1996}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Entwicklung von elektromagnetischen Mikroaktoren. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, journal = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, pages = {158 -- 163}, year = {1996}, language = {de} } @article{KaemperBergWolfetal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Wolf, A. and Lehr, H.}, title = {Entwicklung von Linsenhaltern f{\"u}r ein SMIF-kompatibles Magazinsystem und deren Fertigung durch Mikrospritzguß. Berg, U.; K{\"a}mper, K.-P.; Wolf, A.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{KaemperLehrEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Entwicklung von Mikroantrieben am Institut f{\"u}r Mikrotechnik Mainz. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {77}, year = {1996}, language = {de} } @article{KaemperBergLehretal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Lehr, H. and Ehrfeld, W.}, title = {Experimentelle Untersuchungen zur automatisierten Mikrolinsenmontage. Berg, U.; K{\"a}mper, K.-P.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{Kaemper1994, author = {K{\"a}mper, Klaus-Peter}, title = {Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.}, series = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International}, journal = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International}, address = {Stuttgart}, pages = {getr. Z{\"a}hlung}, year = {1994}, language = {de} } @article{KaemperThuerigenEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Th{\"u}rigen, C. and Ehrfeld, W. and Hagemann, B.}, title = {Gesichtspunkte beim Miniaturisieren von Umlaufr{\"a}dergetrieben. Th{\"u}rigen, C.; Ehrfeld, W. ; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {235}, year = {1996}, language = {de} } @article{KaemperPicardSchuetze2007, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {K{\"o}nnen Studierende einen piezoresistiven Drucksensor in einer Woche selbst{\"a}ndig fertigen?}, series = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, journal = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, publisher = {AWNET}, address = {Berlin}, isbn = {978-3-89750-148-5}, pages = {26 -- 35}, year = {2007}, language = {de} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)}, subject = {Sensor}, language = {en} } @misc{Kaemper2008, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators WS 2008/2009}, year = {2008}, abstract = {Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter K{\"a}mper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index}, subject = {Sensor}, language = {en} } @article{KaemperLehrEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Michel, F.}, title = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.}, series = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, journal = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, address = {Piscataway, N.J.}, isbn = {0780321146}, pages = {43 -- 47}, year = {1994}, language = {en} } @article{KaemperHagemannLehretal.1995, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Lehr, H. and Michel, F.}, title = {LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, journal = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, publisher = {FSRM}, address = {Neuchatel}, pages = {100 -- 110}, year = {1995}, language = {en} } @article{KaemperSchulzEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Ehrfeld, W. and Erbel, R.}, title = {LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, journal = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, publisher = {REPRO EPFL}, address = {Lausanne}, pages = {Getr. Z{\"a}hlung : Ill., graph. Darst.}, year = {1994}, language = {en} } @article{KaemperEhrfeldLehretal.1993, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Lehr, H. and Michel, F.}, title = {LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {Mikroelektronik . 7 (1993), H. 5}, journal = {Mikroelektronik . 7 (1993), H. 5}, isbn = {0931-2714}, pages = {LXIX -- LXXI}, year = {1993}, language = {de} } @article{KaemperPappasMilleretal.1991, author = {K{\"a}mper, Klaus-Peter and Pappas, D. P. and Miller, B. P. and Hopster, H.}, title = {Magnetism of ultrathin films of Fe on Cu(100). Pappas, D. P; K{\"a}mper, K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Luntz, A. C.; Brundle, C.R.; Shen, Z.-X.}, series = {Journal of Applied Physics. 69 (1991), H. 8}, journal = {Journal of Applied Physics. 69 (1991), H. 8}, isbn = {1089-7550}, pages = {5209 -- 521}, year = {1991}, language = {en} } @article{KaemperEhrfeldHesseletal.1997, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hessel, V. and Lacher, M.}, title = {Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.}, series = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1}, journal = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {0-7803-3664-X}, pages = {71 -- 79}, year = {1997}, language = {en} } @article{KaemperDoepperClemensetal.1997, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.}, title = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)}, series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, journal = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, isbn = {0960-1317}, pages = {230 -- 232}, year = {1997}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and D{\"o}pper, J.}, title = {Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.}, series = {Proceedings of the SPIE - The International Society for Optical Engineering}, journal = {Proceedings of the SPIE - The International Society for Optical Engineering}, isbn = {0277-786X}, pages = {202 -- 210}, year = {1996}, language = {en} } @article{KaemperEhrfeldDoepperetal.1997, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and D{\"o}pper, J. and Hessel, V.}, title = {Microfluidic components for biological and chemical microreactors. K{\"a}mper, K.-P.; Ehrfeld, W.; D{\"o}pper, J.; Hessel, V.; Lehr, H.; L{\"o}we, H.; Richter, T.; Wolf, A.}, series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {0-7803-3744-1}, pages = {338 -- 343}, year = {1997}, language = {en} } @article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Mikromontage zur Fertigung hybrider Mikrosysteme. Nienhaus, M.; Berg, U.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, journal = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, pages = {121 -- 126}, year = {1996}, language = {de} } @article{KaemperLacherAbrahametal.1995, author = {K{\"a}mper, Klaus-Peter and Lacher, M. and Abraham, M. and Ehrfeld, W.}, title = {Mikrosysteme f{\"u}r die Luft- und Raumfahrt. Lacher, M.; Abraham, M.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Picard, A.; Zetterer, T.}, series = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, journal = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, publisher = {Deutsche Gesellschaft f{\"u}r Luft- und Raumfahrt}, address = {Lilienthal-Oberth}, pages = {415 -- 423}, year = {1995}, language = {de} } @article{KaemperPicardBrilletal.2002, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {Neue Medien f{\"u}r die praktische MST Ausbildung}, series = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, journal = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, pages = {14 -- 15}, year = {2002}, language = {de} } @article{PicardBrillCasseletal.2002, author = {Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus and K{\"a}mper, Klaus-Peter and Merten, Sabine}, title = {Neue Medien f{\"u}r die praktische MST-Ausbildung}, organization = {FH-Kaiserslautern}, year = {2002}, abstract = {Im Studiengang Mikrosystemtechnik des Fachhochschulstandortes Zweibr{\"u}cken werden zwei neue moderne Anlagen f{\"u}r die Herstellung von mikrotechnischen Komponenten in Betrieb genommen: Ein Oxidationsofen f{\"u}r Herstellung d{\"u}nner Oxidschichten auf Silizium-Einkristallen und eine Belichtungsapparatur f{\"u}r die Fotolithografie - das Besondere an diesen Anlagen: Sie existieren nur virtuell, d.h. als Animationen in einer Computerwelt.}, subject = {Mikrosystemtechnik}, language = {de} } @article{KaemperMertenBrilletal.2005, author = {K{\"a}mper, Klaus-Peter and Merten, Sabine and Brill, Manfred and Picard, Antoni}, title = {Praxisorientierte Ingenieurausbildung durch multimedial unterst{\"u}tzte Laborkurse. Merten, Sabine ; K{\"a}mper, Klaus-Peter ; Brill, Manfred ; Picard, Antoni}, series = {Online-P{\"a}dagogik. Bd. 3 Referenzmodelle und Praxisbeispiele / hrsg. von Burkhard Lehmann ...}, journal = {Online-P{\"a}dagogik. Bd. 3 Referenzmodelle und Praxisbeispiele / hrsg. von Burkhard Lehmann ...}, publisher = {Schneider-Verl. Hohengehren}, address = {Baltmannsweiler}, isbn = {3-89676-987-1}, pages = {278 S. : Ill., graph. Darst.}, year = {2005}, language = {de} } @article{KaemperPappasHopster1990, author = {K{\"a}mper, Klaus-Peter and Pappas, D. P. and Hopster, H.}, title = {Reversible transition between perpendicular and in-plane magnetization in ultrathin films. Pappas, D. P.; K{\"a}mper, K.-P.; Hopster, H.}, series = {Physical Review Letters. 64 (1990), H. 26}, journal = {Physical Review Letters. 64 (1990), H. 26}, isbn = {1079-7114}, pages = {3179 -- 3182}, year = {1990}, language = {en} } @article{KaemperBergBegemannetal.1998, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)}, title = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors}, series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, journal = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, publisher = {Messe Bremen}, address = {Bremen}, isbn = {3-933339-00-6}, pages = {552 -- 555}, year = {1998}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {3 -- 10}, year = {1995}, language = {en} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Skript zur Vorlesung Mikrotechnik 1}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik}, subject = {Mikrosystemtechnik}, language = {de} } @article{KaemperPappasMilleretal.1991, author = {K{\"a}mper, Klaus-Peter and Pappas, D. P. and Miller, B. P. and Hopster, H.}, title = {Spin-dependent electron attenuation by transmission through thin ferromagnetic films . Pappas, D. P.; K{\"a}mper,K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Brundle, C. R.; Luntz, A. C.; Shen, Z.-X.}, series = {Physical Review Letters. 66 (1991), H. 4}, journal = {Physical Review Letters. 66 (1991), H. 4}, isbn = {1079-7114}, pages = {504 -- 507}, year = {1991}, language = {en} } @article{KaemperAbrahamHopster1992, author = {K{\"a}mper, Klaus-Peter and Abraham, D. L. and Hopster, H.}, title = {Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001)}, series = {Physical Review B. 45 (1992), H. 24}, journal = {Physical Review B. 45 (1992), H. 24}, isbn = {1095-3795}, pages = {14335 -- 14346}, year = {1992}, language = {en} } @article{KaemperKurzawaSchmittetal.1986, author = {K{\"a}mper, Klaus-Peter and Kurzawa, R. and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.}, series = {Solid State Communications. 60 (1986), H. 10}, journal = {Solid State Communications. 60 (1986), H. 10}, isbn = {0038-1098}, pages = {777 -- 780}, year = {1986}, language = {en} } @article{KaemperSchmittGuentherodt1990, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature and wave-vector dependence of the spin-split band structure of Ni(111) along the \&\#915;-L line}, series = {Physical Review B. 42 (1990), H. 16}, journal = {Physical Review B. 42 (1990), H. 16}, isbn = {1095-3795}, pages = {10696 -- 10705}, year = {1990}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature dependence of the exchange splitting of Ni along the \&\#61511;-L line}, series = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, journal = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, pages = {39 -- 40}, year = {1988}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Surface Science. 189/190 (1987)}, journal = {Surface Science. 189/190 (1987)}, isbn = {0039-6028}, pages = {741 -- 507}, year = {1987}, language = {en} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} }