@article{KaemperEhrfeldLehretal.1993, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Lehr, H. and Michel, F.}, title = {LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {Mikroelektronik . 7 (1993), H. 5}, journal = {Mikroelektronik . 7 (1993), H. 5}, isbn = {0931-2714}, pages = {LXIX -- LXXI}, year = {1993}, language = {de} } @article{Kaemper1994, author = {K{\"a}mper, Klaus-Peter}, title = {Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.}, series = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International}, journal = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International}, address = {Stuttgart}, pages = {getr. Z{\"a}hlung}, year = {1994}, language = {de} } @article{KaemperLehrAbeletal.1995, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, journal = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, publisher = {Fuji Technology Press}, pages = {31 -- 31}, year = {1995}, language = {en} } @article{KaemperLehrEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Michel, F.}, title = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.}, series = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, journal = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN}, address = {Piscataway, N.J.}, isbn = {0780321146}, pages = {43 -- 47}, year = {1994}, language = {en} } @article{KaemperSchulzEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Ehrfeld, W. and Erbel, R.}, title = {LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, journal = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, publisher = {REPRO EPFL}, address = {Lausanne}, pages = {Getr. Z{\"a}hlung : Ill., graph. Darst.}, year = {1994}, language = {en} } @article{KaemperLacherAbrahametal.1995, author = {K{\"a}mper, Klaus-Peter and Lacher, M. and Abraham, M. and Ehrfeld, W.}, title = {Mikrosysteme f{\"u}r die Luft- und Raumfahrt. Lacher, M.; Abraham, M.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Picard, A.; Zetterer, T.}, series = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, journal = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, publisher = {Deutsche Gesellschaft f{\"u}r Luft- und Raumfahrt}, address = {Lilienthal-Oberth}, pages = {415 -- 423}, year = {1995}, language = {de} } @article{KaemperPicardSchuetzeetal.2006, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A. and Wallach, D.}, title = {Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.; Wallach, D.; Walter, T.}, series = {Mst-News (2006)}, journal = {Mst-News (2006)}, isbn = {0948-3128}, pages = {15, 16 -- u. 35}, year = {2006}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Entwicklung von elektromagnetischen Mikroaktoren. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, journal = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, pages = {158 -- 163}, year = {1996}, language = {de} } @article{KaemperHagemannEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Ehrfeld, W. and Lehr, H.}, title = {Berechnung und Optimierung von Permanentmagnet-Mikromotoren mit Hilfe der Finite-Elemente-Methode. Hagemann, B.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, journal = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, pages = {1 -- 13}, year = {1996}, language = {de} } @article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature dependence of the exchange splitting of Ni along the \&\#61511;-L line}, series = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, journal = {Journal de physique. 49 (1988), H. 12. 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