TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak T1 - Recent advances in biologically sensitive field-effect transistors (BioFETs) JF - Analyst. 127 (2002) Y1 - 2002 SN - 0003-2654 SP - 1137 EP - 1151 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - "High-order” hybrid FET module for (bio)chemical and physical sensing JF - Integrated analytical systems / ed. by Salvador Alegret Y1 - 2003 SN - 0-444-51037-0 SP - 587 EP - 623 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Wagner, Torsten A1 - Beging, Stefan A1 - Rotter, L. A1 - Poghossian, Arshak A1 - Biselli, Manfred A1 - Zang, Werner A1 - Schöning, Michael Josef T1 - Online-Messsysteme für die automatisierte Charakterisierung von feldeffektbasierten Biosensoren JF - 8. Dresdner Sensor-Symposium : Sensoren für Umwelt, Klima und Sicherheit, Biosensoren und Biosysteme, Sensoren und Sensorsysteme für die Prozesstechnik, Trends in der Sensortechnik, Materialentwicklung für die Sensorik; 8. Dresdner Sensor-Symposium, 10. - 12. Dezember 2007, Dresden / Gerald Gerlach ... (Hg.) Y1 - 2007 SN - 978-3-940046-45-1 N1 - Dresdner Sensor-Symposium <8, 2007, Dresden> ; Dresdner Beiträge zur Sensorik ; 29 SP - 257 EP - 260 PB - TUDpress, Verl. der Wissenschaften CY - Dresden ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER -