TY - JOUR A1 - Kirchner, Patrick A1 - Reisert, Steffen A1 - Pütz, Patrick A1 - Keusgen, Michael A1 - Schöning, Michael Josef T1 - Characterisation of polymeric materials as passivation layer for calorimetric H2O2 gas sensors JF - Physica Status Solidi (a) N2 - Calorimetric gas sensors for monitoring the H₂O₂ concentration at elevated temperatures in industrial sterilisation processes have been presented in previous works. These sensors are built up in form of a differential set-up of a catalytically active and passive temperature-sensitive structure. Although, various types of catalytically active dispersions have been studied, the passivation layer has to be established and therefore, chemically as well as physically characterised. In the present work, fluorinated ethylene propylene (FEP), perfluoralkoxy (PFA) and epoxy-based SU-8 photoresist as temperature-stable polymeric materials have been investigated for sensor passivation in terms of their chemical inertness against H₂O₂, their hygroscopic properties as well as their morphology. The polymeric materials were deposited via spin-coating on the temperature-sensitive structure, wherein spin-coated FEP and PFA show slight agglomerates. However, they possess a low absorption of humidity due to their hydrophobic surface, whereas the SU-8 layer has a closed surface but shows a slightly higher absorption of water. All of them were inert against gaseous H₂O₂ during the characterisation in H₂O₂ atmosphere that demonstrates their suitability as passivation layer for calorimetric H₂O₂ gas sensors. Y1 - 2012 U6 - http://dx.doi.org/10.1002/pssa.201100773 SN - 1862-6319 VL - 209 IS - 5 SP - 859 EP - 863 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Kirchner, Patrick A1 - Spelthahn, H. A1 - Schöning, Michael Josef A1 - Henkel, H. A1 - Schneider, A. A1 - Friedrich, P. A1 - Kolstad, J. A1 - Berger, J. T1 - Realisierung eines Polyimid-basierten kalorimetrischen Gassensors zur Inline-Überwachung der H2O2-Konzentration in aseptischen Abfüllanlagen JF - Sensoren und Messsysteme 2010 [Elektronische Ressource] : Vorträge der 15. ITG/GMA-Fachtagung vom 18. bis 19. Mai 2010 in Nürnberg / Informationstechnische Gesellschaft im VDE (ITG); VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik (GMA) Y1 - 2010 SN - 978-3-8007-3260-9 N1 - Fachtagung Sensoren und Messsysteme 15, 2010, Nürnberg ; Gesellschaft Mess- und Automatisierungstechnik SP - 607 EP - 612 PB - VDE Verlag CY - Berlin ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Moreno, Lia A1 - Bratov, A. A1 - Huachupoma, S. A1 - Xu, J. A1 - Wagner, Torsten A1 - Yoshinobu, T. A1 - Ermolenko, Y. A1 - Vlasov, Y. G. A1 - Schöning, Michael Josef T1 - PLD-prepared cadmium sensors based on chalcogenide glasses —ISFET, LAPS and μISE semiconductor structures JF - Sensors and Actuators B: Chemical. 118 (2006), H. 1-2 Y1 - 2006 SN - 0925-4005 N1 - Eurosensors XIX - Eurosensors XIX - The 19th European Conference on Solid-State Transducers SP - 149 EP - 155 ER - TY - CHAP A1 - Kloock, Joachim P. A1 - Moreno, Lia A1 - Huachupoma, S. A1 - Xu, J. A1 - Wagner, Torsten A1 - Bratov, A. A1 - Doll, T. A1 - Vlasov, Y. A1 - Schöning, Michael Josef ED - Gerlach, Gerald T1 - Halbleiterbasierte Schwermetallsensorik auf der Basis von Chalkogenidgläsern für zukünftige „Lab on Chip“-Anwendungen T2 - 7. Dresdner Sensor-Symposium - Neue Herausforderungen und Anwendungen in der Sensortechnik Y1 - 2005 SN - 3-938863-29-3 SP - 221 EP - 224 PB - TUDpress, Verl. der Wissenschaften CY - Dresden ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y. A1 - Schubert, J. A1 - Ermelenko, Y. A1 - Schöning, Michael Josef T1 - Pulsed laser deposition: A tool for fabricating thin-film microsensors JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1032 EP - 1033 ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y.G. A1 - Ermolenko, Y. A1 - Doll, T. A1 - Schubert, J. A1 - Schöning, Michael Josef T1 - Inorganic thin-film sensor membranes with PLD-prepared chalcogenide glasses: Challenges and implementation JF - Sensors. 4 (2004), H. 10 Y1 - 2004 SN - 1424-8220 SP - 156 EP - 162 ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Mourzina, Y.G. A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Schöning, Michael Josef T1 - Chalkogenidglassensoren für die Schwermetallanalytik JF - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl .... Y1 - 2002 SN - 3-8007-2675-0 N1 - Sensoren und Mess-Systeme 2002 SP - 395 EP - 398 PB - VDE-Verl. CY - Berlin [u.a.] ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Poghossian, Arshak A1 - Schumacher, K. A1 - Rosenkranz, C. A1 - Schultze, J. W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Funktionsprüfung und Charakterisierung von ionensensitiven Feldeffekttransistoren (ISFETs) auf Waferebene mittels Mikrotropfenzelle für den zukünftigen Einsatz in der Sensorproduktion JF - Sensoren und Messsysteme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14. März 2006 in Freiburg/Breisgau / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ; VDE/VDI-Gesellschaft Mess- und Automatisierungstechnik (GMA). Wiss. Tagungsleitung: L. M. Reindl Y1 - 2006 SN - 3-8007-2939-3 N1 - Fachtagung Sensoren und Messsysteme <13, 2006, Freiburg, Breisgau> SP - 257 EP - 260 PB - VDE-Verl. CY - Berlin ER - TY - CHAP A1 - Kloock, Joachim P. A1 - Schubert, J. A1 - Ermelenko, Y. 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