TY - JOUR A1 - Kämper, Klaus-Peter A1 - Hagemann, B. A1 - Lehr, H. A1 - Michel, F. T1 - LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; Kämper, K.-P.; Lehr, H.; Michel, F.; Thürigen, C. JF - LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed. Y1 - 1995 N1 - University Enterprise Training Partnership for Micro-Electro-Mechanical Systems SP - 100 EP - 110 PB - FSRM CY - Neuchatel ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Schulz, C. A1 - Ehrfeld, W. A1 - Erbel, R. T1 - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T. JF - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...] Y1 - 1994 N1 - Microengineering in Medicine and Biology Training Course 1994, Lausanne PB - REPRO EPFL CY - Lausanne ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Miller, B. P. A1 - Hopster, H. T1 - Magnetism of ultrathin films of Fe on Cu(100). Pappas, D. P; Kämper, K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Luntz, A. C.; Brundle, C.R.; Shen, Z.-X. JF - Journal of Applied Physics. 69 (1991), H. 8 Y1 - 1991 SN - 1089-7550 SP - 5209 EP - 521 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Hessel, V. A1 - Lacher, M. T1 - Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C. JF - Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1 Y1 - 1997 SN - 0-7803-3664-X SP - 71 EP - 79 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Döpper, J. A1 - Clemens, M. A1 - Ehrfeld, W. T1 - Micro gear pumps for dosing of viscous fluids. / Döpper, J. (u.a.) JF - Journal of Micromechanics and Microengineering. 7 (1997), H. 3 Y1 - 1997 SN - 0960-1317 SP - 230 EP - 232 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Lehr, H. A1 - Abel, S. A1 - Döpper, J. T1 - Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C. JF - Proceedings of the SPIE - The International Society for Optical Engineering Y1 - 1996 SN - 0277-786X N1 - Konferenz-Einzelbericht. SP - 202 EP - 210 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Ehrfeld, W. A1 - Döpper, J. A1 - Hessel, V. T1 - Microfluidic components for biological and chemical microreactors. Kämper, K.-P.; Ehrfeld, W.; Döpper, J.; Hessel, V.; Lehr, H.; Löwe, H.; Richter, T.; Wolf, A. JF - Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ... Y1 - 1997 SN - 0-7803-3744-1 N1 - International Workshop on Micro-Electro-Mechanical Systems <10, 1997, Nagoya> SP - 338 EP - 343 PB - IEEE Service Center CY - Piscataway, NJ ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Abraham, M. A1 - Ehrfeld, W. A1 - Hessel, V. T1 - Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; Kämper, K.-P.; Lacher, M.; Picard, A. JF - Microelectronic Engineering. 41-42 (1998) Y1 - 1998 SN - 0167-9317 N1 - International Conference on Micro- and Nanofarbication SP - 47 EP - 52 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Pappas, D. P. A1 - Hopster, H. T1 - Reversible transition between perpendicular and in-plane magnetization in ultrathin films. Pappas, D. P.; Kämper, K.-P.; Hopster, H. JF - Physical Review Letters. 64 (1990), H. 26 Y1 - 1990 SN - 1079-7114 SP - 3179 EP - 3182 ER - TY - JOUR A1 - Kämper, Klaus-Peter A1 - Berg, U. A1 - Begemann, M. A1 - Hagemann, B. (u.a.) T1 - Series production and testing of a micro motor. Serienfertigung und Prüfung eines Mikromotors JF - Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ... Y1 - 1998 SN - 3-933339-00-6 N1 - Konferenz-Einzelbericht: ACTUATOR, Internat. Conf. on New Actuators SP - 552 EP - 555 PB - Messe Bremen CY - Bremen ER -