TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
T1  - A novel silicon-based sensor array with capacitive EIS structures
JF  - Sensors and Actuators B. 47 (1998), H. 1-3
Y1  - 1998
SN  - 0925-4005
SP  - 225
EP  - 230
ER  - 
TY  - JOUR
A1  - Thust, M.
A1  - Schroth, P.
A1  - Töpler, A.
A1  - Schöning, Michael Josef
A1  - Müller-Veggian, Mattea
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Improving the detection limit of a capacitive sensor by means of a diffusion barrier
JF  - Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1
Y1  - 1998
SN  - 0-7503-0595-9
N1  - Eurosensors ; (12, 1998, Southampton) ; UK Conference on Sensors and Their Applications ; (9, 1998, Southampton)
SP  - 507
EP  - 510
PB  - Inst. of Physics Publ.
CY  - Bristol [u.a.]
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Thust, M.
A1  - Steffen, A.
A1  - Müller-Veggian, Mattea
T1  - Kapazitives Sensorarray in Siliziumtechnik für die Prozeßüberwachung
JF  - ITG-Fachbericht. 148 (1998)
Y1  - 1998
SN  - 0341-0196
SP  - 257
EP  - 263
ER  - 
TY  - JOUR
A1  - Müller-Veggian, Mattea
A1  - Conte, V.
A1  - Colautti, P.
A1  - De Nardo, L.
T1  - Microdosimetric spectra down to 70 nm
JF  - Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 1997 (1998)
Y1  - 1998
N1  - Nebent.: Annual Report LNL-INFN
SP  - 67
EP  - 68
ER  -