TY - CHAP A1 - Merten, Sabine A1 - Kämper, Klaus-Peter A1 - Brill, Manfred A1 - Picard, Antoni A1 - Cassel, Detlev A1 - Jentsch, Andreas A1 - Rollwa, Markus T1 - Vom virtuellen Wafer zum realen Drucksensor N2 - Das Technologiepraktikum „Virtuelle Sensor-Fertigung“ ist ein Beispiel für die medientechnische Aufbereitung von Lern- und Lehrmaterial unter didaktischen Gesichtspunkten. Studierende lernen einen Fertigungsprozess mit Hilfe von virtuellen Maschinen kennen, bevor sie die reale Prozesskette im Laborpraktikum im Reinraum durchführen. N2 - The technology course “Fabrication of a microsensor” represents a multimediabased approach towards education in high technology production in consideration of didactical aspects. The students learn the operation of a complex microfabrication line with the help of virtual fabrication machines before they perform the actual process in a hands-on training in an actual clean room. KW - Virtuelle Maschine KW - VM KW - Virtuelle Sensor-Fertigung KW - virtual fabrication of a microsensor Y1 - 2003 ER - TY - CHAP A1 - Merten, Sabine A1 - Kämper, Klaus-Peter A1 - Brill, Manfred A1 - Picard, Antoni A1 - Cassel, Detlev A1 - Jentsch, Andreas A1 - Rollwa, Markus T1 - Virtuelle Sensor-Fertigung: Hightech mit LabVIEW N2 - Eine neue Generation von Praktika an Hochschulen wächst heran. Moderne Wege beim Verstehen und Erlernen naturwissenschaftlicher Zusammenhänge sowie industrieller Fertigungsprozesse sind gefordert. Das Technologiepraktikum „Virtuelle Sensor- Fertigung“, entwickelt im Verbundprojekt INGMEDIA an den Fachhochschulen Aachen und Zweibrücken, trägt als neuartiges Lern- und Lehrmodul dieser Forderung Rechnung. Die Studierenden lernen einen vollständigen Fertigungsprozess mit Hilfe von virtuellen, in LabVIEW programmierten Maschinen kennen, bevor sie die reale Prozesskette im Reinraum durchführen. N2 - A new generation of university laboratory courses is presently being developed. Modern concepts for the understanding and learning of applied science and industrial fabrication processes are required. The technology course “Fabrication of a microsensor”, developed by the Universities of Applied Sciences Aachen and Zweibrücken in the joint research project INGMEDIA, represents a new approach towards education in high technology production. The students learn the operation of the complex microfabrication line with the help of virtual fabrication machines, programmed in LabVIEW, before they perform the actual process in a genuine clean room. KW - LabVIEW KW - Virtuelle Sensor-Fertigung KW - Fertigungsprozess KW - virtuelle Maschinen KW - virtual sensor fabrication KW - manufacturing process KW - virtual KW - virtual machines Y1 - 2003 ER - TY - CHAP A1 - Merten, Sabine A1 - Conrad, Thorsten A1 - Kämper, Klaus-Peter A1 - Picard, Antoni A1 - Schütze, Andreas T1 - Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries N2 - Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years. KW - Virtuelles Laboratorium KW - Virtuelles Labor KW - Hand-on-training KW - Virtual Technology Lab KW - MEMS ; education and training foundry Y1 - 2006 ER -