TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Schaub, A.
A1  - Zundel, A.
A1  - Beckers, L.
A1  - Schubert, J.
A1  - Zander, W.
A1  - Kordos, P.
A1  - Lüth, H.
T1  - Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors
JF  - Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff
Y1  - 1995
SN  - 2-86332-182-X
N1  - ESSDERC ; (25, 1995, 's-Gravenhage) ; European Solid State Device Research Conference (ESSDERC) ; (25 : ; 1995.09.25-27 : ; Den Haag)
SP  - 601
EP  - 604
PB  - Ed. Frontières
CY  - Gif-sur-Yvette
ER  -