TY - JOUR A1 - Prume, Klaus A1 - Raeder, H. A1 - Tyholdt, F. A1 - Booij, W. E. T1 - Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 357 EP - 362 ER - TY - JOUR A1 - Prume, Klaus A1 - Zalachas, Nicolas A1 - Laskewitz, Bernd A1 - Kamlah, Marc T1 - Effective Piezoelectric Coefficients of Ferroelectric Thin Films on Elastic Substrates / Zalachas, Nicolas ; Laskewitz, Bernd ; Kamlah, Marc ; Prume, Klaus ; Lapusta, Yuri ; Tiedke, Stephan JF - Journal of Intelligent Material Systems and Structures. 20 (2008), H. 6 Y1 - 2008 SN - 1045-389X SP - 683 EP - 695 ER - TY - JOUR A1 - Prume, Klaus A1 - Muralt, Paul A1 - Calame, Florian A1 - Schmitz-Kempen, Thorsten T1 - Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 407 EP - 411 ER - TY - JOUR A1 - Prume, Klaus A1 - Booij, W. E. A1 - Vogl, A. H. A1 - Wang, D. T. T1 - A simple and powerful analytical model for MEMS piezoelectric multimorphs / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 387 EP - 393 ER - TY - JOUR A1 - Prume, Klaus A1 - Tyholdt, F. A1 - Calame, F. A1 - Raeder, H. T1 - Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P. JF - Journal of Electroceramics. 19 (2007), H. 4 Y1 - 2007 SN - 1385-3449 SP - 311 EP - 314 ER - TY - JOUR A1 - Prume, Klaus A1 - Franken, Klaus A1 - Böttger, Ulrich A1 - Waser, Rainer T1 - Modelling and numerical simulation of the electrical, mechanical, and thermal coupled behaviour of Multilayer capacitors (MLCs) / Prume, Klaus ; Franken, Klaus ; Böttger, Ulrich ; Waser, Rainer ; Maier, Horst R. JF - Journal of the European Ceramic Society. 22 (2002), H. 8 Y1 - 2002 SN - 0955-2219 SP - 1285 EP - 1296 ER - TY - JOUR A1 - Prume, Klaus A1 - Roelofs, Andreas A1 - Schmitz, Thorsten A1 - Reichenberg, Bernd T1 - Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb JF - Japanese Journal of Applied Physics. 41 (2002), H. 11B Y1 - 2002 SN - 0021-4922 SP - 7198 EP - 7201 ER - TY - JOUR A1 - Prume, Klaus A1 - Meyer, René A1 - Waser, Rainer A1 - Schmitz, Torsten T1 - Dynamic leakage current compensation in ferroelectric thin-film capacitor structures / Meyer, René ; Waser, Rainer ; Prume, Klaus ; Schmitz, Torsten ; Tiedke, Stephan JF - Applied Physics Letters . 86 (2005), H. 14 Y1 - 2005 SN - 0003-6951 SP - 142907-1 EP - 142907-3 ER - TY - JOUR A1 - Prume, Klaus A1 - Franken, Klaus A1 - Maier, Horst R. A1 - Waser, Rainer T1 - Finite-Element Analysis of Ceramic Multilayer Capacitors: Failure Probability Caused by Wave Soldering and Bending Loads / Franken, Klaus ; Maier, Horst R. ; Prume, Klaus ; Waser, Rainer JF - Journal of the American Ceramic Society. 83 (2000), H. 6 Y1 - 2000 SN - 0002-7820 SP - 1433 EP - 1440 ER - TY - JOUR A1 - Prume, Klaus A1 - Waser, Rainer A1 - Franken, Klaus A1 - Maier, Horst R. T1 - Finite-Element Analysis of Ceramic Multilayer Capacitors: Modeling and Electrical Impedance Spectroscopy for a Nondestructive Failure Test / Prume, Klaus ; Waser, Rainer ; Franken, Klaus ; Maier, Horst R. ; JF - Journal of the American Ceramic Society. 83 (2000), H. 5 Y1 - 2000 SN - 0002-7820 SP - 1153 EP - 1159 ER -