TY  - JOUR
A1  - Prume, Klaus
A1  - Raeder, H.
A1  - Tyholdt, F.
A1  - Booij, W. E.
T1  - Taking piezoelectric microsystems from the laboratory to production  / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 357
EP  - 362
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, Paul
A1  - Calame, Florian
A1  - Schmitz-Kempen, Thorsten
T1  - Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 407
EP  - 411
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Booij, W. E.
A1  - Vogl, A. H.
A1  - Wang, D. T.
T1  - A simple and powerful analytical model for MEMS piezoelectric multimorphs  / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 387
EP  - 393
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Tyholdt, F.
A1  - Calame, F.
A1  - Raeder, H.
T1  - Chemically derived seeding layer for {100}-textured PZT thin films   / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.
JF  - Journal of Electroceramics. 19 (2007), H. 4
Y1  - 2007
SN  - 1385-3449
SP  - 311
EP  - 314
ER  - 
TY  - JOUR
A1  - Prume, Klaus
T1  - Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application  /  Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;
Y1  - 2007
N1  - ISAF 2007. Sixteenth IEEE International Symposium on  Applications of Ferroelectrics, 2007
SP  - 702
ER  - 
TY  - JOUR
A1  - Prume, Klaus
A1  - Muralt, P.
A1  - Calame, F.
A1  - Schmitz-Kempen, T.
T1  - Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices  / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;
JF  - IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1
Y1  - 2007
SN  - 0885-3010
SP  - 81
EP  - 14
ER  -