TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, J A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 55 EP - 66 PB - MCB CY - Warsaw ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Silicon-based biochemical sensors JF - CNI - The Center of Nanoelectronic Systems for Information Technology Y1 - 2003 SP - 165 EP - 170 PB - Foschungszentrum Jülich ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Joachim P. A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4 Y1 - 2001 SN - 0208-5216 SP - 107 EP - 119 ER -