TY - JOUR A1 - Leinhos, Marcel A1 - Schusser, Sebastian A1 - Bäcker, Matthias A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Micromachined multi-parameter sensor chip for the control of polymer-degradation medium JF - Physica Status Solidi (A) : special issue on engineering and functional interfaces N2 - It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium. Y1 - 2014 U6 - http://dx.doi.org/10.1002/pssa.201330364 SN - 1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print) VL - 211 IS - 6 SP - 1346 EP - 1351 PB - Wiley-VCH CY - Weinheim ER - TY - JOUR A1 - Bäcker, Matthias A1 - Schusser, Sebastian A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Multi-Parametererfassung mit siliziumbasiertem Sensorchip: Aus Drei mach Eins JF - GIT Labor-Fachzeitschrift Y1 - 2014 SN - 0016-3538 IS - 2 SP - 28 EP - 30 PB - Wiley ER - TY - JOUR A1 - Huck, Christina A1 - Poghossian, Arshak A1 - Kerroumi, Iman A1 - Schusser, Sebastian A1 - Bäcker, Matthias A1 - Zander, Willi A1 - Schubert, Jürgen A1 - Buniatyan, Vahe V. A1 - Martirosyan, Norayr W. A1 - Wagner, Patrick A1 - Schöning, Michael Josef T1 - Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material JF - Electroanalysis N2 - It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate. Y1 - 2014 U6 - http://dx.doi.org/10.1002/elan.201400076 SN - 1521-4109 (E-Journal); 1040-0397 (Print) VL - 26 IS - 5 SP - 980 EP - 987 PB - Wiley-VCH CY - Weinheim ER -