TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 128 EP - 133 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 288 EP - 290 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou Y1 - 1998 N1 - International Meeting on Chemical Sensors ; (7, 1998, Beijing) ; International Meeting on Chemical Sensors (IMCS) ; (7 : ; 1998.07.27-30 : ; Beijing) SP - 885 EP - 887 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Novel concepts for silicon-based biosensors JF - Physica Status Solidi (A) (2001) Y1 - 2001 SN - 0031-8965 SP - 65 EP - 77 ER - TY - JOUR A1 - Simonis, A. A1 - Lüth, H. A1 - Wang, J. A1 - Schöning, Michael Josef T1 - New concepts of miniaturised reference electrodes in silicon technology for potentiometric sensor systems JF - Sensors and Actuators B. 103 (2004), H. 1-2 Y1 - 2004 SN - 0925-4005 SP - 429 EP - 435 ER - TY - JOUR A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Mourzina, Y. G. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Zander, W. A1 - Lüth, H. T1 - Multicomponent thin films for electrochemical sensor applications prepared by pulsed laser deposition JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 327 EP - 330 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Lüth, H. A1 - Schultze, J.W. T1 - Modifications and characterization of a silicon-based microelectrode array JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3899 EP - 3910 ER - TY - JOUR A1 - Simonis, A. A1 - Dawgul, M. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 U6 - http://dx.doi.org/10.1016/j.electacta.2005.04.063 SP - 930 EP - 937 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Microfabricated semiconductor structures – Advances in (bio-)chemical sensing JF - Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed. Y1 - 2002 SN - 3-540-43699-5 SP - 79 EP - 92 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Hummel, Hans E. A1 - Weißbecker, B. A1 - Lüth, H. A1 - Schütz, S. T1 - Microcsaled living bioelectronic systems – Coupling beetles to silicon transducers JF - Chemical and biological sensors and analytical methods : proceedings of the international symposium / Sensor, Physical Electrochemistry, and Organic and Biological Electrochemistry Divisions. Ed.: M. Butler Y1 - 2001 SN - 1-56677-351-2 N1 - International Symposium: Chemical and Biological Sensors and Analytical Methods ; (2 : 2001.) SP - 165 EP - 173 PB - Electrochemical Society CY - Pennington, NJ ER - TY - JOUR A1 - Kurowski, A. A1 - Schultze, J. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon. JF - Sensors and Actuators B. 83 (2002), H. 1-3 Y1 - 2002 SN - 0925-4005 N1 - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV SP - 123 EP - 128 ER - TY - JOUR A1 - Kurowski, A. A1 - Schultze, J.W. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Micro- and nanopatterning of sensor chips by means of macroporous silicon JF - Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.) Y1 - 2001 SN - 3-540-42150-5 N1 - Eurosensors (15, 2001, München) ; International Conference on Solid State Sensors and Actuators (11, 2001, München) SP - 640 EP - 643 PB - Springer CY - Berlin [u.a.] ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Yoshinobu, T. A1 - Schubert, J. A1 - Lüth, H. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Ion-selective lightaddressable potentiometric sensor (LAPS) with chalcogenide thin film by pulsed laser deposition JF - Sensors and Actuators B. 80 (2001), H. 2 Y1 - 2001 SN - 0925-4005 SP - 136 EP - 140 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - Investigations on porous silicon layers with regard to chemical microsensor applications JF - Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin Y1 - 1996 SN - 0819421650 N1 - International Conference on Intelligent Materials ; (3, 1996, Lyon) SP - 275 EP - 280 PB - SPIE CY - Bellingham, Wash. ER - TY - JOUR A1 - Ismail, A.B.M. A1 - Harada, T. A1 - Yoshinobu, T. A1 - Iwasaki, H. A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Investigation of pulsed laser-deposited Al2O3 as a high pH-sensitive layer for LAPS-based biosensing applications JF - Sensors and Actuators B. 71 (2000), H. 3 Y1 - 2000 SN - 0925-4005 SP - 169 EP - 172 ER - TY - JOUR A1 - Schroth, P. A1 - Schöning, Michael Josef A1 - Kordos, P. A1 - Lüth, H. A1 - Schütz, S. A1 - Weißbecker, B. A1 - Hummel, Hans E. T1 - Insectbased BioFETs with improved signal characteristics JF - Biosensors & Bioelectronics. 14 (1999), H. 3 Y1 - 1999 SN - 0956-5663 SP - 303 EP - 308 ER - TY - JOUR A1 - Schütz, S. A1 - Czynski, J. A1 - Hummel, Hans E. A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Kordos, P. A1 - Lüth, H. T1 - Insect meets microelectronics: A BioFET as a first step to bioelectronic microsystems JF - Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek Y1 - 2000 N1 - International Conference on Solid State Sensors and Actuators <10, 1999, Sendai, Miyagi-ken> ; Transducers '99 ; (10 : ; 1999.06.07-10 : ; Sendai) SP - 1104 EP - 1107 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, J A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Lecture Notes of the ICB Seminars Y1 - 2002 SP - 55 EP - 66 PB - MCB CY - Warsaw ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schubert, Joachim P. A1 - Kloock, Joachim P. A1 - Zander, W. A1 - Mourzina, Y. G. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Innovative thin film techniques for microfabricating electrochemical sensors JF - Biocybernetics and Biomedical Engineering. 21 (2001), H. 4 Y1 - 2001 SN - 0208-5216 SP - 107 EP - 119 ER - TY - JOUR A1 - Thust, M. A1 - Schroth, P. A1 - Töpler, A. A1 - Schöning, Michael Josef A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Improving the detection limit of a capacitive sensor by means of a diffusion barrier JF - Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1 Y1 - 1998 SN - 0-7503-0595-9 N1 - Eurosensors ; (12, 1998, Southampton) ; UK Conference on Sensors and Their Applications ; (9, 1998, Southampton) SP - 507 EP - 510 PB - Inst. of Physics Publ. CY - Bristol [u.a.] ER -