TY  - CHAP
A1  - Merten, Sabine
A1  - Conrad, Thorsten
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Schütze, Andreas
T1  - Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries
N2  - Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.
KW  - Virtuelles Laboratorium
KW  - Virtuelles Labor
KW  - Hand-on-training
KW  - Virtual Technology Lab
KW  - MEMS ; education and training foundry
Y1  - 2006
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schulz, C.
A1  - Ehrfeld, W.
A1  - Erbel, R.
T1  - LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; Kämper, K.-P.; Koch, L.; Lehr, H.; Roth, T.
JF  - 3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]
Y1  - 1994
N1  - Microengineering in Medicine and Biology Training Course 1994, Lausanne
PB  - REPRO EPFL
CY  - Lausanne
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Wesner, D. A.
A1  - Güntherodt, G.
T1  - Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers
JF  - Applied Physics A: Materials Science and Processing. 49 (1989), H. 6
Y1  - 1989
SN  - 1432-0630
SP  - 573
EP  - 578
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
A1  - Gambino, R. J.
T1  - CrO2—A New Half-Metallic Ferromagnet? Kämper, K.-P.; Schmitt, W.; Güntherodt, G.; Gambino, R. J., Ruf, R.
JF  - Physical Review Letters. 59 (1987), H. 24
Y1  - 1987
SN  - 1079-7114
SP  - 2788
EP  - 2791
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; Kämper, K.-P.; Güntherodt, G.
JF  - Surface Science. 189/190 (1987)
Y1  - 1987
SN  - 0039-6028
N1  - Proceedings of the Ninth European Conference on Surface Science
SP  - 741
EP  - 507
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; Kämper, K.-P.; Güntherodt, G.
JF  - Physical Review B. 36 (1987), H. 7
Y1  - 1987
SN  - 1095-3795
SP  - 3763
EP  - 3768
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - Thickness dependence of the electronic structure of ultrathin, epitaxial Ni(111)/W(110) layers.
JF  - Physical Review B. 38 (1988), H. 14
Y1  - 1988
SN  - 1095-3795
SP  - 9451
EP  - 9456
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - Temperature and wave-vector dependence of the spin-split band structure of Ni(111) along the Γ-L line
JF  - Physical Review B. 42 (1990), H. 16
Y1  - 1990
SN  - 1095-3795
SP  - 10696
EP  - 10705
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - Temperature dependence of the exchange splitting of Ni along the -L line
JF  - Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8
Y1  - 1988
N1  - Proceedings of the International conference on Magnetism. Part 1. ICM 88, Paris, France, Juli 25-29, 1988
SP  - 39
EP  - 40
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Brill, Manfred
A1  - Cassel, Detlev
A1  - Jentsch, Andreas
A1  - Merten, Sabine
A1  - Rollwa, Markus
T1  - The Virtual Clean Room - a new tool in teaching MST process technologies
N2  - The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.
KW  - Virtuelle Maschine
KW  - VM
KW  - Mikrosystemtechnik
KW  - MST
KW  - virtual clean room
Y1  - 2003
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Brill, Manfred
A1  - Cassel, Detlef (u.a.)
T1  - The Virtual Cleanroom – a new tool in teaching MST process technologies
JF  - mst news International newsletter on micro - nano Integration (2003)
Y1  - 2003
SN  - 0948-3128
SP  - 35
EP  - 36
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, A.
A1  - Schütze, A.
A1  - Wallach, D.
T1  - Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; Kämper, K.-P.; Schütze, A.; Wallach, D.; Walter, T.
JF  - Mst-News (2006)
Y1  - 2006
SN  - 0948-3128
SP  - 15, 16
EP  - u. 35
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Pappas, D. P.
A1  - Miller, B. P.
A1  - Hopster, H.
T1  - Spin-dependent electron attenuation by transmission through thin ferromagnetic films . Pappas, D. P.; Kämper,K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Brundle, C. R.; Luntz, A. C.; Shen, Z.-X.
JF  - Physical Review Letters. 66 (1991), H. 4
Y1  - 1991
SN  - 1079-7114
SP  - 504
EP  - 507
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Pappas, D. P.
A1  - Miller, B. P.
A1  - Hopster, H.
T1  - Magnetism of ultrathin films of Fe on Cu(100). Pappas, D. P; Kämper, K.-P.; Miller, B. P.; Hopster, H.; Fowler, D. E.; Luntz, A. C.; Brundle, C.R.; Shen, Z.-X.
JF  - Journal of Applied Physics. 69 (1991), H. 8
Y1  - 1991
SN  - 1089-7550
SP  - 5209
EP  - 521
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Pappas, D. P.
A1  - Hopster, H.
T1  - Reversible transition between perpendicular and in-plane magnetization in ultrathin films. Pappas, D. P.; Kämper, K.-P.; Hopster, H.
JF  - Physical Review Letters. 64 (1990), H. 26
Y1  - 1990
SN  - 1079-7114
SP  - 3179
EP  - 3182
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Ehrfeld, W.
A1  - Michel, F.
T1  - LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; Kämper, K.-P.; Michel, F.; Schmidt, M.
JF  - 1994 IEEE Symposium on Emerging Technologies & Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN
Y1  - 1994
SN  - 0780321146
SP  - 43
EP  - 47
CY  - Piscataway, N.J.
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Ehrfeld, W.
A1  - Hagemann, B.
T1  - Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulz, C.; Thürigen C.
JF  - Minimally Invasive Therapy and Allied Technologies. 6 (1997)
Y1  - 1997
SN  - 1364-5706
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Abel, S.
A1  - Ehrfeld, W.
T1  - Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Thürigen, C.
JF  - Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)
Y1  - 1995
N1  - 2nd Japan-France Congress on mechatronics (1994 Nov : Takamatsu, Japan)
SP  - 31
EP  - 31
PB  - Fuji Technology Press
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Lehr, H.
A1  - Abel, S.
A1  - Döpper, J.
T1  - Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren für Mikroroboter  / Lehr, H.; Abel, S.; Döpper, J.; Ehrfeld, W.; Hagemann, B.; Kämper, K.-P.; Michel, F.; Schulu, c.; Thürigen, C.
JF  - Proceedings of the SPIE - The International Society for Optical Engineering
Y1  - 1996
SN  - 0277-786X
N1  - Konferenz-Einzelbericht.
SP  - 202
EP  - 210
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Kurzawa, R.
A1  - Schmitt, W.
A1  - Güntherodt, G.
T1  - Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; Kämper, K.-P.; Schmitt, W.; Güntherodt, G.
JF  - Solid State Communications. 60 (1986), H. 10
Y1  - 1986
SN  - 0038-1098
SP  - 777
EP  - 780
ER  -