TY - JOUR A1 - Thust, M. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Naser, S. A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Crosssensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors ; (13, 1999, 's-Gravenhage) ; Eurosensors ; (13 : ; 1999.09.12-15 : ; The Hague) ; European Conference on Solid-State Transducers ; (13 : ; 1999.09.12-15 : ; The Hague) SP - 573 EP - 576 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Thust, M. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Naser, S. A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Proceedings : The Hague, The Netherlands, September 12 - 15, 1999 / [ed. by M. Bartek]. - Vol 1. Y1 - 1999 SN - 90-76699-02-X N1 - Eurosensors <13, 1999, 's-Gravenhage> ; Eurosensors <13, 1999, The Hague> ; European Conference on Solid-State Transducers <13, 1999, The Hague> SP - 573 EP - 576 CY - The Hague, The Netherlands ER - TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, T. A1 - Simonis, A. A1 - Ecken, H. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS? JF - Proceedings : Copenhagen, Denmark, 27 - 30 August 2000 / [ed.: R. de Reus ...] Y1 - 2000 SN - 87-89935-50-0 N1 - Eurosensors ; (14, 2000, København) ; Eurosensors ; (14 : ; 2000.08.27-30 : ; Copenhagen) ; European Conference on Solid-State Transducers ; (14 : ; 2000.08.27-30 : ; Copenhagen) SP - 27 EP - 30 PB - MIC, Mikroelektronik Centret CY - Lyngby, Denmark ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schöning, Michael Josef A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 260 EP - 265 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Lüth, H. A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - (Bio-)chemical and physical microsensor array using an identical transducer principle JF - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz Y1 - 2001 SN - 0-08-044014-2 SP - 243 EP - 249 PB - Elsevier [u.a.] CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Novel concepts for flow-rate and flow-direction determination by means of pH-sensitive ISFETs JF - Proceedings of SPIE. 4560 (2001) Y1 - 2001 SP - 19 EP - 27 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Lüth, Hans T1 - Semiconductor-based field-effect structures for chemical sensing Y1 - 2001 SP - 188 EP - 198 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schroth, P. A1 - Steffen, A. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Penicillin detection by means of silicon-based field-effect structures JF - Sensors and Materials. 13 (2001), H. 4 Y1 - 2001 SN - 0392-2510 SP - 207 EP - 223 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Simonis, A. A1 - Lüth, H. T1 - An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 519 EP - 526 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Simonis, A. A1 - Ecken, H. A1 - Lüth, Hans A1 - Schöning, Michael Josef T1 - Penicillin detection by means of field-effect based sensors: EnFET, capacitive EIS sensor or LAPS? JF - Sensors and Actuators B. 78 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 237 EP - 242 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ecken, H. A1 - Poghossian, Arshak A1 - Lüth, H. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Alternative sensor materials for light-addressable potentiometric sensors JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 388 EP - 392 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Baade, A. A1 - Emons, H. A1 - Schöning, Michael Josef T1 - Application of ISFET for pH measurements in rain droplets JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 634 EP - 638 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ecken, H. A1 - Poghossian, Arshak A1 - Simonis, A. A1 - Iwasaki, H. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Constant-current-mode LAPS (CLAPS) for the detection of penicillin JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 733 EP - 736 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, L. A1 - Schultze, J. W. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - „High order“ hybrid sensor module based on an identical transducer principle JF - Chemical and biological sensors and analytical methods : proceedings of the international symposium / Sensor, Physical Electrochemistry, and Organic and Biological Electrochemistry Divisions. Ed.: M. Butler Y1 - 2001 SN - 1-56677-351-2 N1 - International Symposium: Chemical and Biological Sensors and Analytical Methods ; (2 : 2001.) SP - 143 EP - 152 PB - Electrochemical Society CY - Pennington, NJ ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak T1 - Recent advances in biologically sensitive field-effect transistors (BioFETs) JF - Analyst. 127 (2002) Y1 - 2002 SN - 0003-2654 SP - 1137 EP - 1151 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Lüth, H. T1 - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters JF - Proceedings of SPIE. 4576 (2002) Y1 - 2002 SP - 149 EP - 159 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, L. A1 - Schöning, Michael Josef T1 - Chemical sensor as a physical sensor: ISFET-based flowvelocity, flow-direction and diffusion-coefficient sensor JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 649 EP - 652 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, L. A1 - Lüth, H. A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Multi-Parameter-Detektions-System unter dem Einsatz eines einzigen Transducerprinzips sowohl für (bio-)chemische als auch physikalische Sensoren JF - Sensoren und Mess-Systeme : Vorträge der 11. ITG/GMA-Fachtagung vom 11. bis 12. März 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl .... Y1 - 2002 SN - 3-8007-2675-0 N1 - Sensoren und Mess-Systeme 2002 SP - 137 EP - 140 PB - VDE-Verl. CY - Berlin [u.a.] ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - "High-order” hybrid FET module for (bio)chemical and physical sensing JF - Integrated analytical systems / ed. by Salvador Alegret Y1 - 2003 SN - 0-444-51037-0 SP - 587 EP - 623 PB - Elsevier CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Schultze, Joachim W. T1 - Measuring seven parameters by two ISFET modules in a microcell set-up JF - Int. Journal of Computational Engineering Science. 4 (2003), H. 2 Y1 - 2003 SN - 1465-8763 SP - 257 EP - 260 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, Lars A1 - Schöning, Michael Josef T1 - Chemical sensor as physical sensor: ISFET-based flowvelocity, flow-direction and diffusion-coefficient sensor JF - Sensors and Actuators B. 95 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 384 EP - 390 ER - TY - JOUR A1 - Mourzina, Y. A1 - Mai, T. A1 - Poghossian, Arshak A1 - Ermolenko, Y. A1 - Yoshinobu, T. A1 - Vlasov, Y. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - K+-selective field-effect sensors as transducers for bioelectronic applications JF - Electrochimica Acta. 48 (2003), H. 20-22 Y1 - 2003 SN - 0013-4686 SP - 3333 EP - 3339 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Application of a (bio-)chemical sensor (ISFET) for the detection of physical parameters in liquids JF - Electrochimica Acta. 48 (2003), H. 20-22 Y1 - 2003 SP - 3289 EP - 3297 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Yoshinobu, Tatsuo A1 - Schöning, Michael Josef T1 - Flow-velocity microsensors based on semiconductor field-effect structures JF - Sensors. 3 (2003), H. 7 Y1 - 2003 SN - 1424-8220 SP - 202 EP - 212 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schultze, J. W. A1 - Schöning, Michael Josef T1 - Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle JF - Sensors and Actuators B. 91 (2003), H. 1-3 Y1 - 2003 SN - 0925-4005 SP - 83 EP - 91 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Detecting Both Physical and (Bio-)Chemical Parameters by Means of ISFET Devices JF - Electroanalysis. 16 (2004), H. 22 Y1 - 2004 SN - 1040-0397 SP - 1863 EP - 1872 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Mai, D.-T. A1 - Mourzina, Y. A1 - Schöning, Michael Josef T1 - Impedance effect of an ion-sensitive membrane: characterisation of an EMIS sensor by impedance spectroscopy, capacitance-voltage and constant-capacitance method JF - Sensors and Actuators B. 103 (2004), H. 1-2 Y1 - 2004 SN - 0925-4005 SP - 423 EP - 428 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Yeung, C.-K. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Microsensors based on ion-sensitive field-effect transistors for biomedical applications JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1036 EP - 1037 ER - TY - JOUR A1 - Kassab, T. A1 - Han, Y. A1 - Poghossian, Arshak A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Detection of layerby-layer adsorbed polyelectrolytes by means of field-effect based capacitive EIS structures JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 1034 EP - 1035 ER - TY - JOUR A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - A miniaturized flow-through cell in SU-8 technique for EIS sensors JF - Biomedizinische Technik. 49 (2004), H. 2 Y1 - 2004 SN - 0932-4666 SP - 994 EP - 995 ER - TY - JOUR A1 - Rolka, David A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Integration of a capacitive EIS sensor into a FIA system for pH and penicillin determination JF - Sensors. 4 (2004) Y1 - 2004 SN - 1424-8220 SP - 84 EP - 94 ER - TY - JOUR A1 - Knobbe, D.-T. A1 - Schöning, Michael Josef A1 - Poghossian, Arshak A1 - Mourzina, Y. T1 - Charakterisierung von kapazitiven EMISSensoren mittels Impedanzspektroskopie, Kapazitäts-Spannungs- und Konstant-Kapazitäts-Messung JF - Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. März 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik Y1 - 2004 SN - 3-18-091829-2 N1 - Auch erschienen als: VDI-Berichte ; 1829 SP - 851 EP - 854 PB - VDI CY - Düsseldorf ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect based devices JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 173 EP - 176 CY - Roma ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Brinkmann, D. A1 - Demuth, C. A1 - Poghossian, Arshak T1 - CIP (cleaning-in-place)-suitable „non-glass“ pH sensor based on a Ta2O5-gate EIS structure JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 857 EP - 860 CY - Roma ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Poghossian, Arshak A1 - Platen, J. A1 - Schöning, Michael Josef T1 - Towards self-aligned nanostructures by means of layerexpansion technique JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 SP - 838 EP - 843 ER - TY - JOUR A1 - Näther, Niko A1 - Rolka, David A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Two microcell flow-injection analysis (FIA) platforms for capacitive silicon-based field-effect sensors JF - Electrochimica Acta. 51 (2005), H. 5 Y1 - 2005 SN - 0013-4686 U6 - http://dx.doi.org/10.1016/j.electacta.2005.04.066 SP - 924 EP - 929 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies JF - Sensors and Actuators B. 108 (2005), H. 1-2 Y1 - 2005 SN - 0925-4005 N1 - Proceedings of the Tenth International Meeting on Chemical Sensors — IMCS - 10 2004 SP - 986 EP - 992 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect-based devices JF - Sensors and Actuators B. 111-112 (2005) Y1 - 2005 SN - 0925-4005 N1 - Eurosensors XVIII 2004 — The 18th European Conference on Solid-State Transducers SP - 470 EP - 480 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Brinkmann, D. A1 - Rolka, David A1 - Demuth, C. A1 - Poghossian, Arshak T1 - CIP (cleaning-in-place) suitable “non-glass” pH sensor based on a Ta2O5-gate EIS structure JF - Sensors and Actuators B: Chemical. 111-112 (2005) Y1 - 2005 SN - 0925-4005 N1 - Eurosensors XVIII 2004 - The 18th European Conference on Solid-State Transducers SP - 423 EP - 429 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Abouzar, Maryam H. A1 - Sakkari, M. A1 - Kassab, T. A1 - Han, Y. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Schöning, Michael Josef T1 - Field-effect sensors for monitoring the layer-by-layer adsorption of charged macromolecules JF - Sensors and Actuators B: Chemical. 118 (2006), H. 1-2 Y1 - 2006 SN - 0925-4005 N1 - Eurosensors XIX - Eurosensors XIX - The 19th European Conference on Solid-State Transducers SP - 163 EP - 170 ER - TY - JOUR A1 - Kloock, Joachim P. A1 - Poghossian, Arshak A1 - Schumacher, K. A1 - Rosenkranz, C. A1 - Schultze, J. W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Funktionsprüfung und Charakterisierung von ionensensitiven Feldeffekttransistoren (ISFETs) auf Waferebene mittels Mikrotropfenzelle für den zukünftigen Einsatz in der Sensorproduktion JF - Sensoren und Messsysteme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14. März 2006 in Freiburg/Breisgau / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ; VDE/VDI-Gesellschaft Mess- und Automatisierungstechnik (GMA). Wiss. Tagungsleitung: L. M. Reindl Y1 - 2006 SN - 3-8007-2939-3 N1 - Fachtagung Sensoren und Messsysteme <13, 2006, Freiburg, Breisgau> SP - 257 EP - 260 PB - VDE-Verl. CY - Berlin ER - TY - CHAP A1 - Näther, Niko A1 - Poghossian, Arshak A1 - Platen, J. A1 - Yoshinobu, T. A1 - Koudelka-Hep, M. A1 - Schöning, Michael Josef T1 - Multi-parameter sensing of both physical and (bio-)chemical quantities using the same transducer principle T2 - Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ... Y1 - 2006 SP - 172 EP - 181 CY - Warsaw ER - TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Wagner, Torsten A1 - Näther, Niko A1 - Rolka, David A1 - Yoshinobu, Tatsuo A1 - Kloock, Joachim P. A1 - Turek, Monika A1 - Ingebrandt, Sven A1 - Poghossian, Arshak T1 - A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices T2 - MRS Proceedings Y1 - 2006 U6 - http://dx.doi.org/10.1557/PROC-0952-F08-02 N1 - Vol. 952 - Symposium F - Integrated Nanosensors SP - 1 EP - 9 ER - TY - CHAP A1 - Schöning, Michael Josef A1 - Abouzar, Maryam H. A1 - Han, Y. A1 - Ingebrandt, S. A1 - Offenhäusser, A. A1 - Poghossian, Arshak T1 - Markierungsfreie DNA-Detektion mit Silizium-Feldeffektsensoren – Messeffekte oder Artefakte? T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 443 EP - 446 PB - VDE Verl. CY - Berlin ER - TY - CHAP A1 - Platen, J. A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Präparation von selbstjustierenden Nanostrukturen mittels Schichtausdehnungstechnik T2 - Sensoren und Mess-Systeme 2006 : Vorträge der 13. ITG/GMA-Fachtagung vom 13. bis 14.3.2006 in Freiburg/Breisgau Y1 - 2006 SN - 3-8007-2939-3 SP - 277 EP - 280 PB - VDE Verl. CY - Berlin ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Poghossian, Arshak T1 - BioFEDs (field-effect devices) : State-of-the-art and new directions JF - Electroanalysis Y1 - 2006 U6 - http://dx.doi.org/10.1002/elan.200603609 SN - 1521-4109 VL - 18 IS - 19-20 SP - 1893 EP - 1900 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schumacher, Kerstin A1 - Kloock, Joachim P. A1 - Rosenkranz, Christian A1 - Schultze, Joachim W. A1 - Müller-Veggian, Mattea A1 - Schöning, Michael Josef T1 - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell N2 - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors. KW - Biosensor KW - Biosensorik KW - ISFET KW - Wafer KW - ISFET KW - wafer-level testing KW - capillary micro-droplet cell Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259 ER - TY - CHAP A1 - Platen, Johannes A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique N2 - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures. KW - Biosensor KW - Nanostructuring KW - layer expansion KW - pattern-size reduction KW - self-aligned patterning Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477 ER - TY - CHAP A1 - Poghossian, Arshak A1 - Schöning, Michael Josef T1 - Silicon-based chemical and biological field-effect sensors T2 - Encyclopedia of Sensors. Vol. 9 S - Sk Y1 - 2006 SN - 1-58883-065-9 SP - 463 EP - 534 PB - ASP, American Scientific Publ. CY - Stevenson Ranch, Calif. ER -