TY - JOUR A1 - Ermelenko, Y. A1 - Yoshinobu, T. A1 - Mourzina, Y. A1 - Furuichi, K. A1 - Iwasaki, H. A1 - Vlasov, Y. A1 - Schöning, Michael Josef T1 - Technology of photocurable polymeric membranes for integrated LAPS JF - Proceedings of the 5th East Asian Conference on Chemical Sensors; the 33rd Chemical Sensor Symposium : December 4 - 7, 2001, Huis Ten Bosch, Sasebo-shi, Nagasaki, Japan / Japan Association of Chemical Sensors; the Electrochemical Society of Japan Y1 - 2001 N1 - Chemical sensors; 17.2001 Suppl. B; East Asian Conference on Chemical Sensors ; (5, 2001; Nagasaki) SP - 66 EP - 68 PB - Japan Association of Chemical Sensors CY - Kasuga, Fukuoka-ken ER - TY - JOUR A1 - Furuichi, K. A1 - Yoshinobu, T. A1 - Ermelenko, T. A1 - Mourzina, Y. A1 - Iwasaki, H. A1 - Schöning, Michael Josef T1 - Simultaneous visualization of multiple ions by the chemical imaging sensor JF - Proceedings of the 5th East Asian Conference on Chemical Sensors; the 33rd Chemical Sensor Symposium : December 4 - 7, 2001, Huis Ten Bosch, Sasebo-shi, Nagasaki, Japan / Japan Association of Chemical Sensors; the Electrochemical Society of Japan Y1 - 2001 N1 - Chemical sensors; 17.2001 Suppl. B; East Asian Conference on Chemical Sensors ; (5, 2001; Nagasaki) SP - 399 EP - 401 PB - Japan Association of Chemical Sensors CY - Kasuga, Fukuoka-ken ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schöning, Michael Josef A1 - Müller-Veggian, Mattea A1 - Kordos, P. A1 - Lüth, H. T1 - Cross-sensitivity of a capacitive penicillin sensor combined with a diffusion barrier JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 260 EP - 265 ER - TY - JOUR A1 - Schmitt, G. A1 - Werner, C. A1 - Schöning, Michael Josef T1 - Microelectrochemical efficiency evaluation of inhibitors for CO2 corrosion of carbon steel under high shear stress gradients JF - Corrosion 2002. Conference Proceedings. NACExpo, 57th Annual Conference and Exhibition, Denver, US, Apr 7-11, 2002 Y1 - 2002 N1 - Paper 02280 SP - 1 EP - 11 PB - NACE International CY - Houston, Texas ER - TY - JOUR A1 - Poghossian, Arshak A1 - Berndsen, L. A1 - Schöning, Michael Josef T1 - Chemical sensor as a physical sensor: ISFET-based flowvelocity, flow-direction and diffusion-coefficient sensor JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 649 EP - 652 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Yoshinobu, T. A1 - Schöning, Michael Josef A1 - Otto, R. A1 - Furuichi, K. A1 - Mourzina, Yu A1 - Ermelenko, Yu A1 - Iwasaki, I. T1 - Portable light-addressable potentiometric sensor (LAPS) for multisensor applications JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 898 EP - 901 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Keusgen, M. A1 - Jünger, M. A1 - Schöning, Michael Josef T1 - Biosensoric detection of the cysteine sulphoxide alliin JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 1175 EP - 1178 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Silicon-based field-effect structures – From dielectrics to bioelectronics JF - Dielectrics in emerging technologies : proceedings of the international symposium ; [papers presented at the First International Symposium on Science and Technology of Dielectrics in Emerging Fields held from 27th April to 2nd May 2003 in Paris, France] / sponsoring divisions: Dielectric Science and Technology, Electronics. Ed.: D. Misra. Y1 - 2003 SN - 1-56677-346-6 N1 - International Symposium on Science and Technology of Dielectrics in Emerging Fields ; (1, 2003, Paris) SP - 31 EP - 37 PB - Electrochemical Society CY - Pennington, NJ ER - TY - JOUR A1 - Mourzina, Y. A1 - Yoshinobu, T. A1 - Ermelenko, Y. A1 - Furuichi, K. A1 - Vlasov, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Technology of photocurable membranes for ion sensors based on laser scanned semiconductor transducer (LSST) JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 254 EP - 257 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Krause, R. A1 - Block, K. A1 - Musameh, M. A1 - Mulchandani, A. A1 - Wang, J. T1 - A dual amperometric / potentiometric FIA-based biosensor for the distinctive detection of organophosphorus pesticides JF - Book of abstracts / ed. by J. Saneistr. Y1 - 2002 SN - 80-01-02576-4 N1 - Eurosensors ; (16, 2002, Praha) SP - 76 EP - 79 PB - Czech Technical University, Faculty of Electrical Engineering, Department of Measurement CY - Prague ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Näther, Niko A1 - Auger, V. A1 - Poghossian, Arshak A1 - Koudelka-Hep, M. T1 - Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 554 EP - 555 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Wagner, Torsten A1 - Wang, C. A1 - Otto, R. A1 - Yoshinobu, T. T1 - Development of a handheld 16 channel pen-type LAPS for electrochemical sensing JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 136 EP - 137 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kloock, Joachim P. A1 - Knobbe, D.-T. A1 - Räde, J. A1 - Keusgen, M. T1 - Silicon field-effect biosensor for cyanide detection JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 98 EP - 99 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ermelenko, Y. A1 - Mourzina, Y. A1 - Schöning, Michael Josef A1 - Iwasaki, H. A1 - Vlasov, Y. T1 - Multi-component analysis based on the light-addressable potentiometric sensor (LAPS) JF - Proceedings : 11th international conference Sensor 2003; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany Y1 - 2003 N1 - Internationale Messe mit Kongress Sensor <11, 2003, Nürnberg> SP - 141 EP - 144 PB - AMA Service CY - Wunstorf ER - TY - JOUR A1 - Ermolenko, Y.E. A1 - Vlasov, Y.G. A1 - Kolodnikov, V.V. A1 - Shabaldkin, D. A. A1 - Kloock, Joachim P. A1 - Schöning, Michael Josef T1 - Diffusion of radioactive tracers (204Tl, 110mAg) and ionic conductivity in membrane materials for the chemical sensors JF - Advances in nuclear and radiochemistry : extended abstracts of papers presented at the Sixth International Conference on Nuclear and Radiochemistry (NRC-6), 29 August to 3 September 2004, Aachen, Germany ; in cooperation with University of Cologne, GDCh, FECS, OECD-NEA and IAEA / Syed M. Qaim ... (eds.). Y1 - 2004 SN - 3893363629 N1 - Schriften des Forschungszentrums Jülich Reihe Allgemeines und Interdisziplinäres ; 3. International Conference on Nuclear and Radiochemistry ; (6, 2004, Aachen) SP - 483 EP - 485 PB - Forschungszentrum Jülich, Zentralbibliothek CY - Jülich ER - TY - JOUR A1 - Mourzina, I.G. A1 - Yoshinobu, T. A1 - Ermolenko, Y.E. A1 - Vlasov, Y. G. A1 - Schöning, Michael Josef A1 - Iwasaki, H. T1 - Immobilization of urease and cholinesterase on the surface of semiconductor transducer for the development of light-addressable potentiometric sensors JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 788 EP - 789 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Wang, J. A1 - Jacobs, M. A1 - Knobbe, D.-T. A1 - Muck, A. T1 - Amperometric PDMS-glass capillary electrophoresis-based biosensor microchip for catechol and dopamine detection JF - Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors Y1 - 2004 N1 - Chemical sensors ; 20.2004 Suppl. B. IMCS ; (10, 2004, Tsukuba) ; International Meeting on Chemical Sensors ; (10 : ; 2004.07.11-14 : ; Tsukuba) SP - 566 EP - 567 PB - Japan Association of Chemical Sensors CY - Fukuoka ER - TY - JOUR A1 - Yoshinobu, T. A1 - Yasuhito, U. A1 - Iwasaki, H. A1 - Näther, Niko A1 - Schöning, Michael Josef A1 - Koudelka-Hep, M. T1 - Applications of the light-addressable potentiometric sensor to microfluidic devices JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 434 EP - 437 CY - Roma ER - TY - JOUR A1 - Poghossian, Arshak A1 - Cherstvy, A. A1 - Schöning, Michael Josef T1 - Possibilities and limitations of label-free detection of DNA hybridization with field-effect based devices JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 173 EP - 176 CY - Roma ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Brinkmann, D. A1 - Demuth, C. A1 - Poghossian, Arshak T1 - CIP (cleaning-in-place)-suitable „non-glass“ pH sensor based on a Ta2O5-gate EIS structure JF - Digest of technical papers : September 12 - 15, 2004, Rome, Italy, Pontificia Universitas Sancto Thoma Aquinate in Urbe / [conference chairperson: C. Di Natale]. Y1 - 2004 SN - 88-7621-282-5 N1 - Eurosensors ; (18, 2004, Roma) SP - 857 EP - 860 CY - Roma ER - TY - JOUR A1 - Wagner, Torsten A1 - Yoshinobu, T. A1 - Rao, C. A1 - Otto, R. A1 - Schöning, Michael Josef T1 - „All-in-one“ solid-state device based on a lightaddressable potentiometric sensor platform JF - Transducers '05 : the 13th International Conference on Solid-State Sensors, Actuators and Microsystems ; Seoul, Korea, [June 5 - 9, 2005] ; digest of technical papers / sponsored by Korean Sensors Society. Technical co-sponsors: IEEE Electron Devices Society Y1 - 2005 SN - 0-7803-83995-6 N1 - International Conference on Solid State Sensors, Actuators and Microsystems ; (13, 2005, Seoul) SP - 1872 EP - 1875 PB - IEEE Operations Center CY - Piscataway, NJ ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Crott, M. A1 - Ronkel, F. A1 - Thust, M. A1 - Schultze, J. W. A1 - Kordos, P. A1 - Lüth, H. T1 - Investigations on porous silicon layers with regard to chemical microsensor applications JF - Third International Conference on Intelligent Materials : Lyon, 3-4-5 June 1996, Center of Congress "L'Espace Tête d'Or" / [publ. by SPIE, the International Society for Optical Engineering]. General chair/ed. by: P. F. Gobin Y1 - 1996 SN - 0819421650 N1 - International Conference on Intelligent Materials ; (3, 1996, Lyon) SP - 275 EP - 280 PB - SPIE CY - Bellingham, Wash. ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Silicon recognizes biochemical parameters: Microchips for analytical sensor applications JF - American Laboratory. 32 (2000), H. 16 Y1 - 2000 SN - 0044-7749 SP - 24 EP - 31 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Iwasaki, H. A1 - Ui, Y. A1 - Furuichi, K. A1 - Ermelenko, Y. A1 - Mourzina, Y. A1 - Wagner, Torsten A1 - Näther, Niko A1 - Schöning, Michael Josef T1 - The light-addressable potentiometric sensor for multi-ion sensing and imaging JF - Methods. 37 (2005), H. 1 Y1 - 2005 SN - 1046-2023 SP - 99 EP - 102 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Hoffmann, W. A1 - Bruns, M. A1 - Ache, H.J. (u.a.) T1 - Chemical microsensors and evaporated silver halide layers JF - Bulgarian Chemical Communications. 26 (1993), H. 3-4 Y1 - 1993 SN - 0324-1130 SP - 402 EP - 410 ER - TY - JOUR A1 - Thust, M. A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Malkoc, Ü. A1 - Dicker, C. I. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Enzyme immobilisation on planar and porous silicon substrates for biosensor applications JF - Journal of Molecular Catalysis B: Enzymatic. 7 (1999), H. 1-4 Y1 - 1999 SN - 1381-1177 SP - 77 EP - 83 ER - TY - JOUR A1 - Schmitt, G. A1 - Faßbender, F. A1 - Lüth, H. A1 - Schöning, Michael Josef A1 - Schultze, J. W. A1 - Buß, G. T1 - Passivation and corrosion of microelectrode arrays JF - Materials and Corrosion. 51 (2000), H. 1 Y1 - 2000 SN - 0947-5117 SP - 20 EP - 25 ER - TY - JOUR A1 - Schubert, J. A1 - Schöning, Michael Josef A1 - Schmidt, C. A1 - Siegert, M. A1 - Mesters, S. A1 - Zander, W. A1 - Kordos, P. A1 - Lüth, H. A1 - Legin, A. A1 - Mourzina, Y. G. A1 - Seleznev, B. A1 - Vlasov, Y. G. T1 - Chalcogenide-based thin film sensors prepared by pulsed laser deposition technique JF - Applied Physics A. 69, (1999), H. Supplement 1 Y1 - 1999 SN - 0947-8396 U6 - http://dx.doi.org/10.1007/s003390051534 SP - 803 EP - 805 ER - TY - JOUR A1 - Schroth, P. A1 - Schöning, Michael Josef A1 - Kordos, P. A1 - Lüth, H. A1 - Schütz, S. A1 - Weißbecker, B. A1 - Hummel, Hans E. T1 - Insectbased BioFETs with improved signal characteristics JF - Biosensors & Bioelectronics. 14 (1999), H. 3 Y1 - 1999 SN - 0956-5663 SP - 303 EP - 308 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Vetter, J. A1 - Kordos, P. (u.a.) T1 - A long-term stable penicillin-sensitive potentiometric biosensor with enzyme immobilized by heterobifunctional crosslinking Y1 - 1996 SN - 0378-4304 SP - 115 EP - 121 ER - TY - JOUR A1 - Emons, H. A1 - Hüllenkremer, B. A1 - Schöning, Michael Josef T1 - Detection of metal ions in aqueous solutions by voltohmmetry JF - Fresenius' Journal of Analytical Chemistry. 369 (2001), H. 1 Y1 - 2001 SN - 0937-0633 SP - 42 EP - 46 ER - TY - JOUR A1 - Ge, B. A1 - Meyer, T. A1 - Schöning, Michael Josef A1 - Wollenberger, U. A1 - Lisdat, F., T1 - Cytochrome c‘ from Chromatium vinosum on gold electrodes JF - Electrochemistry Communications. 2 (2000), H. 8 Y1 - 2000 SN - 1388-2481 SP - 557 EP - 561 ER - TY - JOUR A1 - Emons, H. A1 - Baade, A. A1 - Schöning, Michael Josef T1 - Voltammetric determination of heavy metals in microvolumes of rain water JF - Electroanalysis. 12 (2000), H. 15 Y1 - 2000 SN - 1040-0397 SP - 1171 EP - 1176 ER - TY - JOUR A1 - Mourzina, Y. G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Copper, cadmium and thallium thin film sensors based on chalcogenide glasses JF - Analytica Chimica Acta. 433 (2001) Y1 - 2001 SN - 0378-4304 SP - 103 EP - 110 ER - TY - JOUR A1 - Yoshinobu, T. A1 - Ecken, H. A1 - Poghossian, Arshak A1 - Simonis, A. A1 - Iwasaki, H. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Constant-current-mode LAPS (CLAPS) for the detection of penicillin JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 733 EP - 736 ER - TY - JOUR A1 - Mourzina, Yu. G. A1 - Schubert, J A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Development of multisensor systems based on chalcogenide thin film chemical sensors for the simultaneous multicomponent analysis of metal ions in complex solutions JF - Scaling down in electrochemistry : electrochemical micro- and nanosystem technology ; proceedings of the 3rd International Symposium on Electrochemical Microsystem Technologies, Garmisch-Patenkirchen, Germany, 11 - 15 September 2000 / ed. by J. W. Schultz Y1 - 2001 SN - 0-08-044014-2 SP - 251 EP - 263 PB - Elsevier [u.a.] CY - Amsterdam [u.a.] ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Mourzina, Yu.G. A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. A1 - Vlasov, Y. G. A1 - Lüth, H. T1 - Pulsed laser deposition – an innovative technique for preparing inorganic thin films JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 727 EP - 732 ER - TY - JOUR A1 - Lüth, H. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Schöning, Michael Josef T1 - Biochemical sensors with structured and porous silicon capacitors JF - Materials Science and Engineering B. 69-70 (2000) Y1 - 2000 SN - 0921-5107 SP - 104 EP - 108 ER - TY - JOUR A1 - Emons, H. A1 - Glück, O. A1 - Hüllenkremer, B. A1 - Schöning, Michael Josef T1 - Voltohmmetry as an alternative detection method at polycrystalline metal film electrodes JF - Electroanalysis. 13 (2001), H. 8-9 Y1 - 2001 SN - 1040-0397 SP - 677 EP - 680 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Ronkel, F. A1 - Crott, M. A1 - Thust, M. (u.a.) T1 - Miniaturization of potentiometric sensors using porous silicon microtechnology JF - Electrochimica Acta. 42 (1997), H. 22 Y1 - 1997 SN - 0013-4686 SP - 3185 EP - 3193 ER - TY - JOUR A1 - Schroth, P. A1 - Schöning, Michael Josef A1 - Schütz, S. A1 - Malkoc, Ü. A1 - Steffen, A. A1 - Marso, M. A1 - Hummel, Hans E. A1 - Kordos, P. A1 - Lüth, H. T1 - Coupling of insect antennae to field-effect transistors for biochemical sensing JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3821 EP - 3826 ER - TY - JOUR A1 - Glück, O. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Otto, A. A1 - Emons, H. T1 - Trace metal determination by dc resistance changes of microstructured thin gold film electrodes JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3761 EP - 3768 ER - TY - JOUR A1 - Schmitt, G. A1 - Schultze, J.-W. A1 - Faßbender, F. A1 - Buß, G. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Passivation and corrosion of microelectrode arrays JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3865 EP - 3883 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Lüth, H. A1 - Schultze, J.W. T1 - Modifications and characterization of a silicon-based microelectrode array JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3899 EP - 3910 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schroth, P. A1 - Steffen, A. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Penicillin detection by means of silicon-based field-effect structures JF - Sensors and Materials. 13 (2001), H. 4 Y1 - 2001 SN - 0392-2510 SP - 207 EP - 223 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Simonis, A. A1 - Krings, T. A1 - Lüth, H. A1 - Wang, J. A1 - Schöning, Michael Josef T1 - A „hybrid“ thin-film pH sensor with integrated thick-film reference JF - Sensors. 1 (2001), H. 6 Y1 - 2001 SN - 1424-8220 SP - 183 EP - 192 ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Microelectronics contacts (bio-)chemistry – Semiconductor-based sensors JF - Biologi Italiani. 8 (2001) Y1 - 2001 SN - 0392-2510 SP - 5 EP - 10 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Sauke, M. A1 - Steffen, A. A1 - Marso, M. (u.a.) T1 - Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes JF - Sensors and Actuators B. 27 (1995), H. 1-3 Y1 - 1995 SN - 0925-4005 SP - 325 EP - 328 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Bruns, M. A1 - Hoffmann, W. A1 - Hoffmann, B. (u.a.) T1 - Iodide ion-sensitive field-effect structures JF - Sensors and Actuators B. 15 (1993), H. 1-3 Y1 - 1993 SN - 0925-4005 SP - 192 EP - 194 ER -