TY  - CHAP
A1  - Merten, Sabine
A1  - Conrad, Thorsten
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Schütze, Andreas
T1  - Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries
N2  - Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.
KW  - Virtuelles Laboratorium
KW  - Virtuelles Labor
KW  - Hand-on-training
KW  - Virtual Technology Lab
KW  - MEMS ; education and training foundry
Y1  - 2006
ER  - 
TY  - JOUR
A1  - Kämper, Klaus-Peter
A1  - Picard, Antoni
A1  - Brill, Manfred
A1  - Cassel, Detlev
A1  - Jentsch, Andreas
A1  - Merten, Sabine
A1  - Rollwa, Markus
T1  - The Virtual Clean Room - a new tool in teaching MST process technologies
N2  - The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.
KW  - Virtuelle Maschine
KW  - VM
KW  - Mikrosystemtechnik
KW  - MST
KW  - virtual clean room
Y1  - 2003
ER  - 
TY  - GEN
A1  - Kämper, Klaus-Peter
T1  - Lecture notes Sensors and Actuators WS 2008/2009
N2  - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index
N2  - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2008/2009. 488 Seiten (pdf-Format)
KW  - Sensor
KW  - Aktor
KW  - Sensoren
KW  - Aktoren
KW  - Sensores
KW  - Actuators
KW  - Microfabrication
Y1  - 2008
ER  - 
TY  - GEN
A1  - Kämper, Klaus-Peter
T1  - Lecture notes Sensors and Actuators
N2  - Kennwortgeschützter Zugang nur für Studierende bei Prof. Dr. Klaus-Peter Kämper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)
N2  - Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter Kämper. Winter semester 2007/2008. Version 2007-08-30. 472 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids
KW  - Sensor
KW  - Aktor
KW  - Sensoren
KW  - Aktoren
KW  - Sensores
KW  - Actuators
KW  - Microfabrication
Y1  - 2007
ER  -