TY - JOUR A1 - Förster, Arnold A1 - Lüth, H. T1 - Surface reactions of trimethylgallium and trimethylarsenic on silicon surfaces JF - Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 7 (1989), H. 4 Y1 - 1989 SN - 1071-1023 N1 - ISSN der E-Ausg.: 0734-211X SP - 720 EP - 724 ER - TY - JOUR A1 - Förster, Arnold A1 - Layet, J. M. A1 - Lüth, H. T1 - Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy JF - Applied Surface Science. 41 - 42 (1989) Y1 - 1989 SN - 0169-4332 N1 - ISSN der E-Ausg.: 0169-4332 SP - 306 EP - 311 ER - TY - JOUR A1 - Förster, Arnold A1 - Rizzi, Angela A1 - Lüth, H. T1 - Epitaxial growth and characterization of Si/NiSi2/Si(111) heterostructures / Angela Rizzi ; A. Förster ; H. Lüth JF - Surface Science. 211 - 212 (1989) Y1 - 1989 SN - 0039-6028 N1 - ISSN der E-Ausg.: 0039-6028 SP - 620 EP - 629 ER -