TY  - CHAP
A1  - Platen, Johannes
A1  - Poghossian, Arshak
A1  - Schöning, Michael Josef
T1  - Microstructured Nanostructures – nanostructuring by means of conventional photolithography and layer-expansion technique
N2  - A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, “fluidic-channel”-, “cantilever”- and meander-type structures.
KW  - Biosensor
KW  - Nanostructuring
KW  - layer expansion
KW  - pattern-size reduction
KW  - self-aligned patterning
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1477
ER  - 
TY  - CHAP
A1  - Poghossian, Arshak
A1  - Schumacher, Kerstin
A1  - Kloock, Joachim P.
A1  - Rosenkranz, Christian
A1  - Schultze, Joachim W.
A1  - Müller-Veggian, Mattea
A1  - Schöning, Michael Josef
T1  - Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell
N2  - A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of “good” ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.
KW  - Biosensor
KW  - Biosensorik
KW  - ISFET
KW  - Wafer
KW  - ISFET
KW  - wafer-level testing
KW  - capillary micro-droplet cell
Y1  - 2006
U6  - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:hbz:a96-opus-1259
ER  -