TY  - JOUR
A1  - Förster, Arnold
A1  - Layet, J. M.
A1  - Lüth, H.
T1  - The effect of inhomogeneous dopant profiles on the electron energy loss spectra of Si(100) /
JF  - Applied Physics A: Materials Science & Processing. 47 (1988), H. 1
Y1  - 1988
SN  - 0947-8396
N1  - ISSN der E-Ausg.: 1432-0630
SP  - 95
EP  - 97
ER  - 
TY  - JOUR
A1  - Förster, Arnold
A1  - Layet, J. M.
A1  - Lüth, H.
T1  - Evaluation of dopant profiles and diffusion constants by means of electron energy loss spectroscopy
JF  - Applied Surface Science. 41 - 42 (1989)
Y1  - 1989
SN  - 0169-4332
N1  - ISSN der E-Ausg.: 0169-4332
SP  - 306
EP  - 311
ER  -