TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, Anette
A1  - Ruge, Christian
A1  - Ecken, Holger
A1  - Müller-Veggian, Mattea
A1  - Lüth, Hans
T1  - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer
JF  - Sensors. 2 (2002), H. 1
N2  - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.
Y1  - 2002
SN  - 1424-8220
U6  - http://dx.doi.org/10.3390/s20100011
SP  - 11
EP  - 22
ER  - 
TY  - JOUR
A1  - Ermelenko, Y.
A1  - Yoshinobu, T.
A1  - Mourzina, Y.
A1  - Furuichi, K.
A1  - Levichev, S.
A1  - Vlasov, Y.
A1  - Schöning, Michael Josef
A1  - Iwasaki, H.
T1  - Lithium sensor based on the laser scanning semiconductor transducer
JF  - Analytica Chimica Acta. 459 (2002), H. 1
Y1  - 2002
SN  - 0378-4304
SP  - 1
EP  - 9
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Poghossian, Arshak
A1  - Schultze, J. W.
A1  - Lüth, H.
T1  - Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters
JF  - Proceedings of SPIE. 4576 (2002)
Y1  - 2002
SP  - 149
EP  - 159
ER  - 
TY  - JOUR
A1  - Kurowski, A.
A1  - Schultze, J.
A1  - Lüth, H.
A1  - Schöning, Michael Josef
T1  - Micro- and nanopatterning of sensor chips by means of macroporous silicon.
JF  - Sensors and Actuators B. 83 (2002), H. 1-3
Y1  - 2002
SN  - 0925-4005
N1  - Selected Papers from TRANSDUCERS '01 EUROSENSORS XV
SP  - 123
EP  - 128
ER  - 
TY  - JOUR
A1  - Ermelenko, Y.
A1  - Yoshinobu, T
A1  - Mourzina, Y.
A1  - Levichev, S.
A1  - Furuichi, K.
A1  - Vlasov, Y.
A1  - Schöning, Michael Josef
A1  - Iwasaki, H.
T1  - Photocurable membranes for ion-selective light-addressable potentiometric sensors
JF  - Sensors and Actuators B. 85 (2002), H. 1-2
Y1  - 2002
SN  - 0925-4005
SP  - 79
EP  - 85
ER  - 
TY  - JOUR
A1  - Vlasov, Y. G.
A1  - Mourzina, Y. G.
A1  - Legin, A. V.
A1  - Ermelenko, Y. E.
A1  - Schubert, J.
A1  - Schöning, Michael Josef
A1  - Lüth, H.
T1  - Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition
JF  - Russian Journal of Applied Chemistry. 75 (2002), H. 3
Y1  - 2002
SN  - 1070-4272
SP  - 351
EP  - 356
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Wang, Josepf
A1  - Krause, Robin
A1  - Block, Kirstin
A1  - Musameh, Mustafa
A1  - Mulchandani, Ashok
A1  - Mulchandani, Priti
A1  - Chen, Wilfred
T1  - Dual amperometric-potentiometric biosensor detection system for monitoring organophosphorus neurotoxins
JF  - Analyica Chimica Acta. 469 (2002), H. 2
Y1  - 2002
SN  - 0378-4304
SP  - 197
EP  - 203
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Kloock, Joachim P.
A1  - Mourzina, Y.
A1  - Schubert, J.
T1  - A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials
JF  - Sensors. 2 (2002), H. 9
Y1  - 2002
SN  - 1424-8220
SP  - 356
EP  - 365
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Simonis, A.
A1  - Krings, T.
A1  - Lüth, H.
A1  - Wang, J.
T1  - Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis
JF  - Electroanalysis
Y1  - 2002
SN  - 1040-0397
VL  - 14
IS  - 13
SP  - 955
EP  - 958
ER  - 
TY  - JOUR
A1  - Schöning, Michael Josef
A1  - Poghossian, Arshak
T1  - Recent advances in biologically sensitive field-effect transistors (BioFETs)
JF  - Analyst. 127 (2002)
Y1  - 2002
SN  - 0003-2654
SP  - 1137
EP  - 1151
ER  -