TY - JOUR A1 - Schmitt, G. A1 - Schultze, J.-W. A1 - Faßbender, F. A1 - Buß, G. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Passivation and corrosion of microelectrode arrays JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3865 EP - 3883 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Lüth, H. A1 - Schultze, J.W. T1 - Modifications and characterization of a silicon-based microelectrode array JF - Electrochimica Acta. 44 (1999), H. 21-22 Y1 - 1999 SN - 0013-4686 SP - 3899 EP - 3910 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Thust, M. A1 - Schroth, P. A1 - Steffen, A. A1 - Lüth, H. A1 - Schöning, Michael Josef T1 - Penicillin detection by means of silicon-based field-effect structures JF - Sensors and Materials. 13 (2001), H. 4 Y1 - 2001 SN - 0392-2510 SP - 207 EP - 223 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Simonis, Anette A1 - Ruge, Christian A1 - Ecken, Holger A1 - Müller-Veggian, Mattea A1 - Lüth, Hans T1 - A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer JF - Sensors. 2 (2002), H. 1 N2 - Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode. Y1 - 2002 SN - 1424-8220 U6 - http://dx.doi.org/10.3390/s20100011 SP - 11 EP - 22 ER - TY - JOUR A1 - Simonis, A. A1 - Krings, T. A1 - Lüth, H. A1 - Wang, J. A1 - Schöning, Michael Josef T1 - A „hybrid“ thin-film pH sensor with integrated thick-film reference JF - Sensors. 1 (2001), H. 6 Y1 - 2001 SN - 1424-8220 SP - 183 EP - 192 ER - TY - JOUR A1 - Schöning, Michael Josef T1 - Microelectronics contacts (bio-)chemistry – Semiconductor-based sensors JF - Biologi Italiani. 8 (2001) Y1 - 2001 SN - 0392-2510 SP - 5 EP - 10 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Sauke, M. A1 - Steffen, A. A1 - Marso, M. (u.a.) T1 - Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes JF - Sensors and Actuators B. 27 (1995), H. 1-3 Y1 - 1995 SN - 0925-4005 SP - 325 EP - 328 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Bruns, M. A1 - Hoffmann, W. A1 - Hoffmann, B. (u.a.) T1 - Iodide ion-sensitive field-effect structures JF - Sensors and Actuators B. 15 (1993), H. 1-3 Y1 - 1993 SN - 0925-4005 SP - 192 EP - 194 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schütz, S. A1 - Schroth, P. A1 - Weißbecker, B. A1 - Steffen, A. A1 - Kordos, P. A1 - Hummel, Hans E. T1 - A BioFET on the basis of intact insect antennae JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 235 EP - 238 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Thust, M. A1 - Müller-Veggian, Mattea A1 - Kordos, P. T1 - A novel silicon-based sensor array with capacitive EIS structures JF - Sensors and Actuators B. 47 (1998), H. 1-3 Y1 - 1998 SN - 0925-4005 SP - 225 EP - 230 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Tsarouchas, D. A1 - Schaub, A. A1 - Beckers, L. (u.a.) T1 - A highly long-term stable silicon-based pH sensor using pulsed laser deposition technique JF - Sensors and Actuators B. 35 (1996), H. 1-3 Y1 - 1996 SN - 0925-4005 SP - 228 EP - 233 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Kurowski, A. A1 - Thust, M. A1 - Kordos, P. A1 - Schultze, J. W. A1 - Lüth, H. T1 - Capacitive microsensors for biochemical sensing on porous silicon technology JF - Sensors and Actuators B. 64 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 59 EP - 64 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Malkoc, Ü. A1 - Thust, M. A1 - Steffen, A. A1 - Kordos, P. A1 - Lüth, H. T1 - Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 288 EP - 290 ER - TY - JOUR A1 - Schütz, S. A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Weißbecker, B. A1 - Kordos, P. A1 - Lüth, H. A1 - Hummel, Hans E. T1 - An insectbased BioFET as a bioelectronic nose JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 291 EP - 295 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Buß, G. A1 - Faßbender, F. A1 - Glück, O. A1 - Schmitt, G. A1 - Schultze, J. W. A1 - Lüth, H. T1 - A silicon-based microelectrode array for chemical analysis JF - Sensors and Actuators B. 65 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 284 EP - 287 ER - TY - JOUR A1 - Mourzina, Y.G. A1 - Schöning, Michael Josef A1 - Schubert, J. A1 - Zander, W. A1 - Legin, A. V. A1 - Vlasov, Y. G. A1 - Kordos, P. A1 - Lüth, H. T1 - A new thin film Pb microsensor based on chalcogenide glasses JF - Sensors and Actuators B. 71 (2000), H. 1-2 Y1 - 2000 SN - 0925-4005 SP - 13 EP - 18 ER - TY - JOUR A1 - Faßbender, F. A1 - Schmitt, G. A1 - Schöning, Michael Josef A1 - Lüth, H. A1 - Buß, G. A1 - Schultze, J. W. T1 - Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 128 EP - 133 ER - TY - JOUR A1 - Ismail, A.B.M. A1 - Harada, T. A1 - Yoshinobu, T. A1 - Iwasaki, H. A1 - Schöning, Michael Josef A1 - Lüth, H. T1 - Investigation of pulsed laser-deposited Al2O3 as a high pH-sensitive layer for LAPS-based biosensing applications JF - Sensors and Actuators B. 71 (2000), H. 3 Y1 - 2000 SN - 0925-4005 SP - 169 EP - 172 ER - TY - JOUR A1 - Schöning, Michael Josef A1 - Schmidt, C. A1 - Schubert, J. A1 - Zander, W. A1 - Mesters, S. A1 - Kordos, P. A1 - Lüth, H. A1 - Legin, A. A1 - Seleznev, B. A1 - Vlasov, Y. G. T1 - Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique JF - Sensors and Actuators B. 68 (2000), H. 1-3 Y1 - 2000 SN - 0925-4005 SP - 254 EP - 259 ER - TY - JOUR A1 - Poghossian, Arshak A1 - Schöning, Michael Josef A1 - Schroth, P. A1 - Simonis, A. A1 - Lüth, H. T1 - An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime JF - Sensors and Actuators B. 76 (2001), H. 1-3 Y1 - 2001 SN - 0925-4005 SP - 519 EP - 526 ER -